DMD structure XY multi-shaft movable optical path direct writing exposure machine

Abstract

The invention discloses a DMD structure XY multi-shaft movable optical path direct writing exposure machine, and belongs to the technical field of direct writing exposure. According to the DMD structure XY multi-shaft movable optical path direct writing exposure machine, mainly the structure of the vacuum suction disk is improved, such that the problem that the suction is insufficient due to the gas leakage during the production of the small plate is effectively solved; and further the gas pores are sparsely distributed in the middle of the suction disk and are densely distributed on the periphery of the suction disk, such that the problem of the plate edge warpage is effectively eliminated, the number of the gas pores is saved, and the cost is reduced. According to the present invention,with the DMD structure XY multi-shaft movable optical path direct writing exposure machine, the 55-inch super-large plate can be produced; the two groups of the movement assemblies are respectively connected to the left side and the right side below the suction disk, and the movement shafts of the two groups of the movement assemblies synchronously move so as to improve the exposure precision andthe operation stability; and by improving the partition alignment focusing method, the accurate image exposure position and the clear image expose can be ensured.

Description

technical field [0001] The invention relates to a DMD structure XY multi-axis movable optical path direct writing exposure machine, which belongs to the technical field of direct writing exposure. Background technique [0002] PCB (printed circuit board) is the support body of electronic components, and also the carrier of electrical connection of electronic components. Common PCB production equipment includes traditional exposure machines, multi-prism structure laser direct writing exposure machines, DMD structure laser direct writing exposure machines, etc. The laser direct writing exposure machine can directly image the image on the PCB board. Compared with the traditional exposure machine, it does not need to use film, and the formed image is clearer. [0003] As the market's functional requirements for PCB boards are getting higher and higher, PCB boards are becoming more and more complex, and system compatibility is higher. Sometimes a large substrate is required. How...

AI Technical Summary

Problems solved by technology

[0011] In view of the above problems, the present invention provides a vacuum chuck and a DMD structure XY multi-axis movable optical path direct writing exposure machine containing the vacuum chuck, so as to solve the problem that the existing technology cannot produce super large boards, the vacuum chuck leaks, and the focusing and positioning during the exposure process Inaccurate and other issues

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