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Holding device and carrier assembly including the holding device

A holder and carrier technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of equipment downtime, restricted production line utilization, and defective glass substrates, so as to improve production line productivity. Mobility rate, reduce the incidence of defects, ensure the effect of maintaining the effect

Active Publication Date: 2020-06-12
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

During the sputtering process, since the glass substrate inevitably shakes normally, the clamping sheet is likely to scratch the edge of the glass substrate to be treated at this time, resulting in defective glass substrates, which in turn restricts the utilization rate of the production line and consumes equipment. Downtime is not conducive to the improvement of production line capacity

Method used

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  • Holding device and carrier assembly including the holding device
  • Holding device and carrier assembly including the holding device
  • Holding device and carrier assembly including the holding device

Examples

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Embodiment Construction

[0027] The technical solution of the present disclosure will be further described in detail through the following embodiments and in conjunction with the accompanying drawings. In the specification, the same or similar reference numerals designate the same or similar components. The following description of the embodiments of the present disclosure with reference to the accompanying drawings is intended to explain the general disclosure concept of the present disclosure, and should not be construed as a limitation on the present disclosure.

[0028] In addition, in the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details.

[0029] The present disclosure mainly relates to the technical field of process processing of liquid crystal displa...

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Abstract

The invention relates to the technical field of fabrication processing of a liquid crystal display product and discloses a holding appliance. In one embodiment, the holding appliance at least comprises a supporting piece, an anti-scratching keeper and a connector, wherein the supporting piece is configured to be connected with a carrier; the carrier is used for carrying a target substrate; the anti-scratching keeper is configured to keep the target substrate on the carrier in a mode of not contacting the target substrate; and the connector is fixedly connected with the supporting piece and theanti-scratching keeper. Besides, the invention also discloses a carrier assembly comprising the holding appliance.

Description

technical field [0001] The present disclosure relates to the technical field of liquid crystal display products, in particular to a holding tool and a carrier assembly including the holding tool. Background technique [0002] In the manufacturing process of liquid crystal display products, it is usually necessary to perform sputtering, rubbing and other processing processes on the glass substrate. For example, in a sputtering process, a glass substrate needs to be held on a carrier in order to perform a sputtering process on a surface of the glass substrate to be treated. Currently, a common practice is to support and maintain the glass substrate on the carrier of the sputtering equipment by clamping members and supporting members arranged around the carrier so as to perform sputtering treatment on the glass substrate. The currently used clamping member usually clamps the glass substrate on the carrier in such a way that the clamping piece of the clamping member directly co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/68H01L21/683
CPCH01L21/68H01L21/683
Inventor 朱凯王海胜杨玉白海涛陈而论刘宇航徐川川周衡梁满吴康李丹丹
Owner BOE TECH GRP CO LTD
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