Environment controllable type atomic force microscope-based numerical control rotary type probe switching device

Abstract

The invention discloses an environment controllable type atomic force microscope-based numerical control rotary type probe switching device. The environment controllable type atomic force microscope-based numerical control rotary type probe switching device comprises a cavity upper cover and a probe switching structure. An irregular rectangular boss, an inner groove, a rectangular light window structure and a sealing flange structure are arranged on the cavity upper cover. The environment controllable type atomic force microscope-based numerical control rotary type probe switching device has the following prominent advantages: 1) due to the design of the irregular rectangular boss, the inner groove, the rectangular light window structure and the sealing flange structure, the internal working space of the cavity is obviously increased and the space utilization rate is effectively increased; 2) due to asymmetrical cooperative design of the inner groove, an L-shaped transitional plate connecting structure, a probe bracket and a probe carrying block, the laser vertical focusing height and the focusing position are effectively guaranteed; and 3) efficient and accurate switching of 8 probes with different functions is realized through program control and in different working environments of vacuum, atmosphere, liquid and the like, so that the functions of surface shape scanning, Raman spectrum analysis, microscopic friction wear and friction coefficient measurement are realized in situ in the same working environment.

Description

technical field [0001] The invention belongs to the field of precision instruments, and in particular relates to a numerically controlled rotary probe switching device based on an environment-controllable atomic force microscope. In different working environments such as the environment, the efficient and precise switching of probes with different functions can be realized through program control, and then the surface topography scanning, Raman spectrum analysis, microscopic friction and wear and friction can be realized in situ on the same experimental area of ​​the sample surface in the same working environment. Coefficient measurement and other functions. Background technique [0002] The environment-controllable atomic force microscope is a kind of working environment that can choose different working environments such as vacuum environment, atmosphere environment, liquid environment and variable temperature environment, and is based on detecting the weak interaction bet...

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Problems solved by technology

[0008] 1. The device uses an external manual drive device to manually switch probes with different functions in a linear manner. Due to the low precision of the external manual drive device itself, it needs to cooperate with the sample stage back and forth during operation to achieve the positioning of the same experimental area at the nanoscale. Time-consuming and labor-intensive operation, low efficiency

[0009] 2. The number of probes carried by the device is very limited, and only 3 probes can be carried at most according to the design

In experiments that require more than 3 probes (such as friction and wear tests between 2 or more probes and the sample in the frictional energy dissipation measurement experiment in a vacuum environment, a total of at least 4 probes are required), the The device obviously cannot meet the experimental requirements

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