Industrial process data clustering method for density peak clustering

An industrial process and density peak technology, which is applied in the direction of instruments, calculations, character and pattern recognition, etc., can solve the problems that the number of cluster centers cannot be automatically determined, the optimal cluster center cannot be determined, and the accuracy of cluster results is low. , to achieve good applicability, reduce the amount of calculation, and achieve the effect of high classification accuracy

Inactive Publication Date: 2018-09-14
HUAZHONG UNIV OF SCI & TECH
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  • Claims
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AI Technical Summary

Problems solved by technology

[0007] Aiming at the above defects or improvement needs of the prior art, the present invention provides an industrial process data clustering method for density peak clustering, thereby solving the problem of low

Method used

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  • Industrial process data clustering method for density peak clustering
  • Industrial process data clustering method for density peak clustering
  • Industrial process data clustering method for density peak clustering

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Experimental program
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Effect test

Embodiment 1

[0053] Embodiment 1 adopts the industrial process data clustering method based on the improved Density Peaks Clustering (DPC: Density Peaks Clustering) provided by the present invention, and verifies through the industrial process of semiconductors. Table 1 shows 16 different modalities and Correspondence table for industrial process data.

[0054] Table 1

[0055] modal

Data points corresponding to the modality

1

1-24

2

25-49

3

50-73

4

74-82

5

83-107

6

108-132

7

133-153

8

154-178

9

179-203

10

204-223

11

224-248

12

249-269

13

270-294

14

295-318

15

319-340

16

341-364

[0056] The verification data used in Embodiment 1 of the present invention comes from the data of the semiconductor industry process, and the modern semiconductor production line is composed of hundreds of continuous batch processing stages. Each stage ...

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Abstract

The invention discloses an industrial process data clustering method for density peak clustering, which comprises: acquiring industrial process data to form a data set; combining the Euclidean distance between data in the data set with a time factor to obtain the distance between the data; obtaining a truncation distance according to the distance between the data and an adjustment parameter, so asto obtain the local density of each data, and calculating the minimum distances between each data and the data having local density larger than its local density; ordering the products of the local density of each data in the data set and the minimum distances, using the first H pieces of data with large products as clustering centers, and determining that the data, in the data with larger localdensity than the cluster center, closest to the clustering center and the clustering center belong to the same category; determining the class attribute of the data without class attributes in the data set according to a descending order of the local densities, so as to obtain the clustering result of industrial process data. The clustering centers of the invention are reasonable, and the number of clustering centers is automatically determined and less time complexity is achieved.

Description

technical field [0001] The invention belongs to the technical field of normal data, fault data and different mode classification of industrial processes, and more specifically relates to a clustering method for industrial process data of density peak clustering. Background technique [0002] For a large-scale industrial system, due to the change of production strategy and production environment, the industrial process often presents the characteristics of multi-mode and multi-fault. For different modes, we need to establish different sub-models, so that the whole model can have better performance to monitor industrial processes and predict quality indicators. Therefore, it is of great significance to conduct mode identification and fault classification for multi-mode industrial processes before modeling. [0003] Currently the most widely used methods for modal identification and fault classification are based on data-driven methods. There are two main methods, one is to u...

Claims

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Application Information

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IPC IPC(8): G06K9/62
CPCG06F18/23
Inventor 郑英陈斌汪上晓张洪
Owner HUAZHONG UNIV OF SCI & TECH
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