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A kind of preparation method of skin sensor based on sacrificial layer technology and prepared product

A sacrificial layer and sensor technology, applied in the direction of sensors, semiconductor/solid-state device manufacturing, electric solid-state devices, etc., can solve the problems of easy deformation of skin sensors, damage to sensor structure, and inability to use, etc., to achieve low price, ensure safety, and avoid pollution Effect

Active Publication Date: 2021-05-11
WUHAN HUAWEIKE INTELLIGENT TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the skin sensor itself is soft and easy to deform, how to peel it off intact is a current technical problem
[0005] The sacrificial layers commonly used in traditional semiconductor processes, such as photoresist, are highly toxic, and it is necessary to strengthen the protection of operators during the production process and strictly control the residual amount in the product; secondly, the traditional sacrificial layer needs to use Dissolution of organic reagents, or etching with inorganic reagents, the former will generally cause swelling of most flexible polymer materials and damage the sensor structure, while the latter is usually highly toxic and difficult to completely remove in the later stage, and some reagents may even damage the sensor structure. Reacts with flexible substrates and cannot be used

Method used

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  • A kind of preparation method of skin sensor based on sacrificial layer technology and prepared product

Examples

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preparation example Construction

[0036] According to one aspect of the present invention, as figure 1 As shown, the present invention provides a method for preparing a skin sensor based on sacrificial layer technology, comprising the following steps:

[0037] In step (1), polyvinyl alcohol powder is added into deionized water 3 to dissolve, and configured into a polyvinyl alcohol solution, which is left to stand for later use. Preferably, the mass fraction of polyvinyl alcohol in the polyvinyl alcohol solution is 8-12%. The configuration method of the polyvinyl alcohol solution is as follows: use a balance to weigh a predetermined mass of polyvinyl alcohol powder, then use a measuring cylinder to measure a predetermined volume of deionized water 3 and pour it into a beaker, and then slowly add the polyvinyl alcohol powder into the beaker , and stir with a glass rod at the same time; after mixing evenly, put magnetic beads into the solution and stir for 4 to 6 hours on a magnetic stirrer, while heating to pro...

Embodiment 1

[0056] a Select a 4-inch monocrystalline silicon wafer as the hard substrate 4, and use acetone 1, isopropanol 2, and deionized water 3 to ultrasonically clean the polished surface of the silicon wafer in sequence. The cleaning time of each reagent is 2 minutes, and finally use nitrogen gas 5 Dry the surface and let it stand for later use.

[0057] b Spin-coat a polyvinyl alcohol solution with a mass fraction of 10% on the hard substrate 4 at a spin-coating speed of 500 rpm and a spin-coating time of 5 minutes. Then put the hard substrate 4 on a hot plate and heat it at 80° C. for 20 minutes, so that the water is heated and evaporated, and the polyvinyl alcohol is cured to form a film, and the preparation of the sacrificial layer is completed. Among them, the manufacturer of polyvinyl alcohol is Shanghai Chenqi Chemical Technology Co., Ltd., the model is PVA1788, the degree of polymerization is 1650-1850, and the degree of alcoholysis is 88%.

[0058] c Spin-coat polydimethyl...

Embodiment 2

[0064] a Select a 4-inch monocrystalline silicon wafer as the hard substrate 4, and use acetone 1, isopropanol 2, and deionized water 3 to ultrasonically clean the polished surface of the silicon wafer in sequence. The cleaning time of each reagent is 2 minutes, and finally use nitrogen gas 5 Dry the surface and let it stand for later use.

[0065] b The material and preparation method of the sacrificial layer are the same as in Example 1.

[0066] c Spin-coat platinum-catalyzed silicone rubber on the polyvinyl alcohol sacrificial layer 6 as the substrate of the sensor, the spin-coating speed is 800 rpm, and the spin-coating time is 3 minutes, and then it is cured at room temperature for 2 hours to obtain Flexible base7. The model of platinum-catalyzed silicone rubber is Ecoflex 00-30, and the mass ratio of the two components is 1:1. The thickness of the substrate under this condition was 50 micrometers.

[0067] d Integration of the sensor element 8 on the flexible substra...

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Abstract

The invention discloses a method for preparing a skin sensor based on a sacrificial layer process, which is characterized in that it comprises the following steps: step (1) configuring a polyvinyl alcohol solution; step (2) cleaning the hard substrate; step (3) configuring the The polyvinyl alcohol solution is spin-coated on a hard substrate, and then heated and cured to form a film to obtain a polyvinyl alcohol sacrificial layer; step (4) spin-coats a flexible high polymer material on the polyvinyl alcohol sacrificial layer and then heats the high polymer The object material is cured to form a flexible substrate; step (5) integrates the sensor element on the flexible substrate; step (6) puts it into deionized water and heats it, so that the polyvinyl alcohol sacrificial layer is completely dissolved; step (7) integrates the sensor element The flexible substrate is peeled off from the hard substrate, so far, the preparation of the epidermal sensor is completed. The invention can ensure the integrity of the sensor after stripping, the sacrificial polyvinyl alcohol layer is soluble in water, non-toxic and harmless, safe and reliable in operation, and low in cost.

Description

technical field [0001] The invention belongs to the field of flexible electronic skin, and in particular relates to a method for preparing a skin sensor based on a sacrificial layer technology and a prepared product. Background technique [0002] At present, flexible electronic devices are favored by people because of their softness and stretchability, and are applied to more and more fields. Epidermal sensors are one of them, which can be attached to the skin to measure human motion, physiological signals or make medical diagnosis. Traditional hard sensors do not have soft characteristics and cannot be in good contact with the skin, which not only limits the improvement of signal quality, but also blocks the development from static biological detection to dynamic biological detection. The epidermal sensor effectively overcomes the above shortcomings, not only can directly adhere to the skin via van der Waals force and maintain conformal contact to ensure signal quality, bu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): A61B5/00H01L51/00
CPCA61B5/6801H10K71/12H10K71/80H10K77/111Y02E10/549
Inventor 吴豪郭伟黄鑫
Owner WUHAN HUAWEIKE INTELLIGENT TECH
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