Sample surface structure imaging method based on transmission electron microscope

Abstract

The invention relates to the technical field of material surface structure characterization, and discloses a sample surface structure imaging method based on transmission electron microscope based ona transmission electron microscope. The method comprises the following steps: preparing a transmission electron microscope sample; obtaining the low magnification image of the sample; and obtaining the high magnification image of the surface structure of the sample. The method adjusts the view finding depth and the view finding position of an objective lens by adjusting the focal length of the transmission electron microscope objective lens, and uses the view finding position and the limited view finding depth of the objective lens to enhance the surface structure information of the sample andweaken the internal structure information of the sample in order to simply, quickly and accurately obtain a transmission electron microscope image for truly reflecting the surface structure of the sample, so the performances of a material or a device can be effectively evaluated. The method has the characteristics of low implementation cost, high efficiency, strong maneuverability and repeatability, and high technical reliability, and is suitable for being widely applied to the field of solid surface research.

Description

technical field [0001] The invention relates to the technical field of material surface structure characterization, in particular to a sample surface structure imaging method based on a transmission electron microscope. Background technique [0002] The surface of a solid material is composed of the outermost layer or several atomic layers of the solid, and its thickness is less than 1 nanometer. The structure inside a solid can extend all the way out to the surface, where it is interrupted. Because the structure inside the solid is interrupted in the direction perpendicular to the surface, the difference between the surface structure of the solid and the internal structure is caused. The difference between the solid internal structure and the surface structure leads to the electronic structure and electronic state distribution of the surface are different from the solid interior, so the physical and chemical properties of the surface are completely different from the solid...

AI Technical Summary

Problems solved by technology

The main disadvantage of this method is that only by tilting and taking pictures of the nano-scale spike-like sample area, can the two-dimensional transmission electron microscope images of the same area of ​​the sample be obtained at different inclination angles. The entire tilting experiment and three-dimensional reconstruction process are cumbersome. It is also complicated, and the three-dimensional reconstruction experiment of transmission electron microscope can only be carried out in a special electron microscopy laboratory.

[0005] To sum up, the proportion of sample surface structure information contained in conventional transmission electron microscope images is small, and it is impossible to directly extract the surface structure image information for the characterization of the sample surface structure.

Although the three-dimensional reconstruction technology of the transmission electron microscope can be used to observe the surface structure of the sample, it can only be observed in a specific environment for a sample of a specific shape, and the operation process is complicated and cumbersome, making it impossible to establish a characterization method for the surface microstructure of the material through the transmission electron microscope. widely used

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