High Precision Langmuir Probe
A Langmuir probe, high-precision technology, applied in the direction of plasma, electrical components, etc., can solve problems such as the easy conduction between the collector and the protection ring, and the loss of the collector's ability to work
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[0037] Such as Figure 1-Figure 6 As shown, the high-precision Langmuir probe provided by this embodiment includes a collector 10 and a protective ring 20; the protective ring 20 is provided with a through hole 201 for the collector 10 to pass through, and the collector 10 is covered with a spacer 30. And the isolation sleeve 30 is located between the collector 10 and the protection ring 20 ; the isolation sleeve 30 is provided with a receiving portion 301 , and the receiving portion 301 is used to receive the plume pollutants entering the installation gap between the collector 10 and the isolation sleeve 30 .
[0038] Specifically, the high-precision Langmuir probe includes a collector 10 and a protective ring 20, the collector 10 is a component for collecting plasma, the protective ring 20 is a component for protecting the collector 10, and the protective ring 20 It is arranged on the outside of the collector 10; when in use, the high-precision Langmuir probe is placed in th...
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