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Precision displacement sensor based on right-angle reflector unit and measuring method thereof

A technology of right-angle mirrors and mirror groups, applied in the field of measurement, can solve problems such as high cost and complex instrument structure, and achieve the effects of convenient mass production, high measurement accuracy and small overall structure

Pending Publication Date: 2018-10-16
BEIFANG UNIV OF NATITIES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, optical sensors have become widely used tools in the field of measurement technology, but most of these instruments are complex in structure and high in cost.

Method used

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  • Precision displacement sensor based on right-angle reflector unit and measuring method thereof
  • Precision displacement sensor based on right-angle reflector unit and measuring method thereof
  • Precision displacement sensor based on right-angle reflector unit and measuring method thereof

Examples

Experimental program
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Embodiment 1

[0049] see figure 1, this embodiment schematically discloses a precision displacement sensor based on a right-angle mirror group, including a laser 1, a first mirror group 3, the first mirror group 3 includes a mirror one 31 and a mirror two 32, a photoelectric Detector 5, housing 6. Wherein the angle between the first reflector 31 and the second reflector 32 is a right angle.

[0050] In the new precision displacement sensor based on right-angle mirror group:

[0051] The laser 1 emits a laser beam 2, and the laser beam 2 is incident on the mirror one 31 of the first mirror group 3 of the first group, and the mirror one 31 reflects the incident laser beam 2 to the mirror two 32, and the mirror two 32 receives the laser beam 2 reflected by mirror one 31, and makes the laser beam 2 reflect, and the photodetector 5 receives the laser beam 2 reflected by mirror two 32, and measures its incident position; 5 Calculate the displacement change of the measured object from the incid...

Embodiment 2

[0062] see figure 2 , image 3 , this embodiment schematically discloses a precision displacement sensor based on a right-angle mirror group, including a laser 1, a first mirror group 3, the first mirror group 3 includes a mirror one 31 and a mirror two 32, the second The second mirror group 4 , the second mirror group 4 includes a third mirror 41 and a fourth mirror 42 , a photodetector 5 , and a housing 6 . Wherein, the included angle between the first reflector 31 and the second reflector 32 is a right angle, and the included angle between the third reflector 41 and the fourth reflector 42 is a right angle. The third mirror 41 is parallel to the second mirror 32, and the fourth mirror 42 is parallel to the first mirror 31.

[0063] In the new precision displacement sensor based on right-angle mirror group:

[0064] The laser 1 emits a laser beam 2, and the laser beam 2 is incident on the mirror one 31 of the first mirror group 3 of the first group, and the mirror one 31...

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Abstract

The invention relates to a precision displacement sensor based on right-angle reflector unit and measuring method thereof. The precision displacement sensor comprises a laser source used for emittinga laser beam, wherein the laser beam is emitted onto a reflector 1 in a first reflector unit; a reflector 2 is used for receiving the laser beam reflected by the reflector 1 and reflecting the received laser beam onto a reflector 3 or a photoelectric detector; the reflector 3 is used for receiving the laser beam reflected by the reflector 2 and reflecting the received laser beam onto a reflector 4; the photoelectric detector is used for receiving the laser beam that is reflected by the reflector 2 but no longer received by the reflector 3 and measuring a position of incidence; a processing system is used for working out the variation of displacement of a measured object pursuant to the position of incidence of the laser beam received by the photoelectric detector. The sensor has a simple structure but high measuring precision, facilitating mass production.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a precision displacement sensor based on a right-angle mirror group and a measurement method thereof. Background technique [0002] The new principle of displacement measurement based on the optical triangular amplification method is realized on the basis of the optical triangular amplification method, combined with triangular wave optical devices and high-precision PSD (Position Sensitive Device, position sensitive (sensitive) detector). After optical triangulation amplification, the small horizontal displacement t is amplified to T on the photodetector (PSD), which can greatly improve the accuracy of length measurement. Therefore, optical sensors have become widely used tools in the field of measurement technology, but most of these instruments have complex structures and high costs. Contents of the invention [0003] The object of the present invention is to propose a ...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张白
Owner BEIFANG UNIV OF NATITIES