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Micro-electronic machinery cleaning equipment

A technology of microelectronic machinery and microelectronics, applied in cleaning methods and utensils, cleaning methods using liquids, drying solid materials, etc., can solve problems such as product quality and service life, improve quality and service life, and effectively clean , strong cleaning effect

Inactive Publication Date: 2018-10-23
ANHUI NIKOLA ELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Under normal circumstances, these pollutants will remain on the surface of the product through physical adsorption or chemical adsorption, which will have a serious impact on the quality and service life of the product

Method used

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  • Micro-electronic machinery cleaning equipment

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Embodiment Construction

[0013] Through the description of the embodiments below, the specific implementation of the present invention includes the shape, structure, mutual position and connection relationship between the various parts, the function and working principle of each part, the manufacturing process and the operation and use method of the various components involved. etc., to make further detailed descriptions to help those skilled in the art have a more complete, accurate and in-depth understanding of the inventive concepts and technical solutions of the present invention.

[0014] Such as figure 1 As shown, the mechanical cleaning device of the present invention includes a cover body 1, a cleaning chamber 2, a steam generator 3, a drying chamber 4, a first connecting pipe 5, an air pump 6, a nozzle 7, a motor 8, a coupling 9, a rotating shaft 10, Place the disc 11, the clamping part 12, the piston 13, the cylinder 14, the second communication pipe 15, the air release valve 16, the pneumat...

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Abstract

The invention discloses micro-electronic machinery cleaning equipment. The micro-electronic machinery cleaning equipment comprises a cleaning chamber, a centrifugal cleaning unit, a steam generation unit and a negative pressure control unit. The centrifugal cleaning unit is arranged in the cleaning chamber (2), to-be-cleaned micro-electronic components are placed on the centrifugal cleaning unit,the steam generation unit feeds steam into the cleaning chamber (2), and the negative pressure control unit adjusts the internal volume of the cleaning chamber (2) so as to control the pressure intensity of the cleaning chamber (2). Cleaning of the micro-electronic components is beneficial for improving the quality of the micro-electronic components and prolonging the service life of the micro-electronic components. Hydrofluoric acid gas has a strong cleaning function on oxide films on the surfaces of the components, and cleaning is carried out in a negative pressure state, so that grooves ofthe components are cleaned effectively.

Description

technical field [0001] The invention belongs to the technical field of mechanical design, and in particular relates to a microelectronic mechanical cleaning device. Background technique [0002] During the production and processing of microelectronic products, the products will be contaminated due to the influence of various factors. Generally, these pollutants will remain on the surface of the product through physical adsorption or chemical adsorption, which will have a serious impact on the quality and service life of the product. Contents of the invention [0003] According to the deficiencies of the above prior art, the technical problem to be solved by the present invention is to propose a microelectronic mechanical cleaning method, which can clean the surface of microelectronic components by spraying hydrofluoric acid vapor under the action of negative pressure, so as to achieve the purpose of cleaning. [0004] In order to solve the above technical problems, the te...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/02B08B3/08B08B13/00F26B5/08
CPCB08B3/02B08B3/08B08B13/00F26B5/08
Inventor 夏森黄耀陈大龙芮望颐
Owner ANHUI NIKOLA ELECTRONICS TECH CO LTD