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A multifunctional laser precision machining equipment

A precision machining, multi-functional technology, applied in metal processing equipment, laser welding equipment, welding equipment and other directions, can solve problems such as low efficiency

Active Publication Date: 2020-08-18
BEIJING INST OF AEROSPACE CONTROL DEVICES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing technology has the problem of low efficiency, that is, after each trimming, offline observation and detection of trimming results are required, and the second trimming and positioning is time-consuming

Method used

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  • A multifunctional laser precision machining equipment

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Embodiment Construction

[0035] The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary, and are intended to explain the present invention and should not be construed as limiting the present invention.

[0036] A multifunctional laser precision machining apparatus according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0037] like figure 1 As shown, a multifunctional laser precision processing equipment according to an embodiment of the present invention includes: a laser 101, a beam expander 102, an attenuator 103, a first total reflection mirror 104, a second total reflection mirror 105, and a third total refl...

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Abstract

The embodiment of the invention provides multifunctional laser precision machining equipment. The multifunctional laser precision machining equipment comprises a laser device, a beam expander, an attenuator, a first total reflective mirror, a second total reflective mirror, a third total reflective mirror, a rotation reflective mirror, a fourth total reflective mirror, a scanning galvanometer module, a fifth total reflective mirror, a first camera, an online detection probe, a sixth total reflective mirror, a beam regulation and control module, a seventh total reflective mirror, a second camera, a third camera, and a displacement platform. The rotation reflective mirror can switch between the position reflecting laser beams to the fourth total reflective mirror and the position reflectinglaser beams to the sixth total reflective mirror. According to the multifunctional laser precision machining equipment in the embodiment of invention, depending on machining requirements of a device,the cutting and trimming technological processes can be conducted individually or successively one by one; and the cutting technological process can be conducted either before or after the trimming technological process is conducted.

Description

technical field [0001] The invention relates to a multifunctional laser precision machining device, in particular to a multifunctional laser precision machining device that can realize cutting and trimming. Background technique [0002] With the rapid development of science and technology, people have put forward higher requirements for the size, accuracy, performance and stability of devices, especially in the semiconductor, optoelectronics, and optical communication industries. As an emerging technology, laser processing effectively meets the high-quality processing requirements of devices. Using the characteristics of high laser energy density, small spot size, and non-contact, it realizes cutting, welding, cleaning, and trimming of various precision devices. [0003] For laser precision cutting, the existing technologies mainly use pulsed lasers as processing sources, and most of them use nanosecond and picosecond lasers. On the one hand, nanosecond and picosecond laser...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/064B23K26/03B23K26/0622
CPCB23K26/032B23K26/0624B23K26/0643
Inventor 王军龙李广李本海冯巧玲薛亚飞李凯雷名威
Owner BEIJING INST OF AEROSPACE CONTROL DEVICES
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