Unlock instant, AI-driven research and patent intelligence for your innovation.

A Linearized Output Detection Method of Weakly Coupled Resonant Sensor

A resonant sensor and detection method technology, which is applied in the testing/calibration of speed/acceleration/shock measuring equipment, instruments, measuring devices, etc., can solve the problems of limiting the range of use of sensors and not being able to achieve linearized output of separation points, etc.

Active Publication Date: 2020-02-14
NORTHWESTERN POLYTECHNICAL UNIV
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

from image 3 It can be seen that the amplitude ratio output of the weakly coupled resonator also has a mode separation phenomenon, which leads to the linear working range of the first-order mode being limited to the range of δ0
Therefore, for any mode of the resonator, its amplitude ratio and frequency output cannot realize the linearized output on both sides of the separation point: that is, the linearized output in the range from δ0, therefore, the prior art The amplitude ratio output detection method of the weakly coupled resonator used in the method seriously limits the scope of use of the sensor

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A Linearized Output Detection Method of Weakly Coupled Resonant Sensor
  • A Linearized Output Detection Method of Weakly Coupled Resonant Sensor
  • A Linearized Output Detection Method of Weakly Coupled Resonant Sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0033] Image 6 The method for detecting the amplitude difference output of a weakly coupled micromechanical resonance acceleration sensor in this embodiment is shown. A weakly coupled resonant acceleration sensor includes a movable mass, a weakly coupled resonator system and its dual resonator in-phase drive detection circuit. The resonator I602 and the resonator II603 are coupled together through a mechanical coupling beam 604 to form a weakly coupled resonator system. 605 is the driving electrode of resonator I, 606 is the detection electrode of resonator I, 607 is the movable mass, 608 is the driving electrode of resonator II, and 609 is the detection electrode of resonator II.

[0034] The weakly coupled resonant acceleration sensor adopts a driving detection method of electrostatic driving and capacitance detection. The DC voltage from the DC power supply 610 is applied to the fixed anchor point 601 of the resonator to form an electrostatically driven DC bias. The signal...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a linear output detection method of a weak coupling resonant type sensor based on modal localization, and belongs to the field of MEMS. The method specifically comprises the following steps: step 1, determining whether double resonators are in an in-phase driving state or an inverted-phase driving state, if in the in-phase driving state, selecting the first-order mode as the working mode, if in the inverse-phase driving state, selecting a second-order mode as the working mode; step 2, detecting the amplitude difference (|X1 (j omega)-X2(j omega)|) of the two resonatorsto obtain the relation between the amplitude difference and the to-be-detected amount. The invention provides a linear output method of the weak coupling resonant type sensor based on modal localization, the amplitude difference of the two resonators under the driving condition of the double resonators is adopted instead of the amplitude ratio as the output of the sensor, and the output linearization of the weak coupling resonance type sensor at the two sides of the separation point is realized for the first time.

Description

[0001] Field: [0002] The invention relates to a linearized output detection method of a weakly coupled resonant sensor based on modal localization, and belongs to the field of microelectromechanical systems (MEMS). Background technique: [0003] MEMS resonant sensors are playing an increasingly important role in more and more fields with their advantages of high accuracy, small size, light weight, low power consumption, low cost, easy integration, mass production, and direct digital output. . [0004] In recent years, weakly coupled resonant sensors based on modal localization have gradually become a research hotspot in the field of resonant sensors due to their high sensitivity and high robustness. Modal localization means that in two weakly coupled resonator systems, when the structural parameters of one of the resonators change due to external interference, the eigenvalues, eigenvectors and other parameters of the system will all change. The weakly coupled resonant sensor base...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01P21/00
CPCG01P21/00
Inventor 常洪龙张和民钟纪明杨晶
Owner NORTHWESTERN POLYTECHNICAL UNIV