Electro-optic modulation dual-comb morphology measuring device and verification method thereof

Abstract

The invention provides an electro-optic modulation dual-comb morphology measuring device and a verification method thereof. The electro-optic modulation dual-comb morphology measuring device comprisesthe components of an electro-optic dual-comb generating module which is used for generating optical frequency combs with different central frequencies and different repetition frequencies; a multi-heterohyne one-dimensional distance measuring module which is used for measuring one-dimensional distance information of a measured object in a laser emitting-out direction; a two-dimensional motion module which is used for driving the measured object to perform spiral movement and supplies two-dimensional distance information of the measured object in an x-direction and a y-direction; and a calculation processing unit which is used for integrating and analyzing the distance information of the measured object in the z-direction, the x-direction and the y-direction and generates the three-dimensional morphology of the measured object. The electro-optic modulation dual-comb morphology measuring device and the verification method thereof are advantages in that a synthetic wavelength distance measuring device based on electro-optic modulation dual-comb is utilized; high z-direction distance measuring accuracy can be realized; easy device adjustment is realized; and operations such verticality verification can be conveniently realized.

Description

technical field [0001] The invention belongs to the technical field of three-dimensional shape measurement, and in particular relates to an electro-optic modulation double-comb shape measurement device and a verification method thereof. Background technique [0002] Three-dimensional shape measurement technology is widely used in quality inspection, integrated circuit manufacturing, industrial assembly and other fields. Traditional shape measurement technology only needs to be divided into two aspects: the visual method suitable for the surface of large objects and the method suitable for small objects. White light interferometry technology and probe method measurement technology for shape measurement. The visual method suitable for the surface of a large object can measure a large area, but it is limited by the performance of the camera, and it is difficult to obtain very accurate measurement accuracy; Slow, and all belong to the incremental measurement method. When encoun...

AI Technical Summary

Problems solved by technology

The visual method suitable for the surface of a large object can measure a large area, but it is limited by the performance of the camera, and it is difficult to obtain very accurate measurement accuracy; Slow, and all belong to the incremental measurement method. When encountering a large undulating surface or a stepped surface, the value cannot be measured

At present, the industrial field lacks a three-dimensional measurement technology that is compatible with large and small measured surfaces, high precision, and strong robustness.

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