Electro-optic modulation double-comb shape measuring device and its calibration method

Abstract

An electro-optical modulation dual-comb profile measurement device and a verification method thereof, the electro-optic modulation dual-optical comb profile measurement device comprising: an electro-optic modulation dual-comb generation module, used to generate optical frequencies with different center frequencies and repetition frequencies Comb; multi-heterodyne one-dimensional ranging module, used to measure the one-dimensional distance information of the measured object in the direction of its outgoing laser; two-dimensional motion module, used to drive the measured object to do spiral movement, and provide the measured object x The two-dimensional distance information in the direction and y direction; the calculation processing unit is used to integrate and analyze the distance information in the z direction, x direction and y direction of the measured object to generate the three-dimensional shape of the measured object. The electro-optic modulation dual-comb shape measuring device and its verification method of the present invention use a synthetic wavelength ranging device based on electro-optic modulation dual-combs, which can obtain high z-direction ranging accuracy, and the device is easy to adjust and can be conveniently implemented Verticality calibration and other work.

Description

technical field [0001] The invention belongs to the technical field of three-dimensional shape measurement, and in particular relates to an electro-optic modulation double-comb shape measurement device and a verification method thereof. Background technique [0002] Three-dimensional shape measurement technology is widely used in quality inspection, integrated circuit manufacturing, industrial assembly and other fields. Traditional shape measurement technology only needs to be divided into two aspects: the visual method suitable for the surface of large objects and the method suitable for small objects. White light interferometry technology and probe method measurement technology for shape measurement. The visual method suitable for the surface of a large object can measure a large area, but it is limited by the performance of the camera, and it is difficult to obtain very accurate measurement accuracy; Slow, and all belong to the incremental measurement method. When encoun...

AI Technical Summary

Problems solved by technology

The visual method suitable for the surface of a large object can measure a large area, but it is limited by the performance of the camera, and it is difficult to obtain very accurate measurement accuracy; Slow, and all belong to the incremental measurement method. When encountering a large undulating surface or a stepped surface, the value cannot be measured

At present, the industrial field lacks a three-dimensional measurement technology that is compatible with large and small measured surfaces, high precision, and strong robustness.

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