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Low-g value double-slit interferometric MEMS microgravity measuring device

A double-slit interference and measurement device technology, applied in the direction of measurement devices, gravitational field measurement, geophysical measurement, etc., to achieve the effects of high processing accuracy, small size, and improved sensitivity

Active Publication Date: 2018-11-20
XI AN JIAOTONG UNIV
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  • Claims
  • Application Information

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Problems solved by technology

Its characteristic is that as the force increases, the spring is no longer applicable to Hooke's law of constant stiffness, and a "soft spring effect" occurs. Based on this, the applicant designed a method based on the anti-spring effect to adjust the force-frequency characteristics and utilize the principle of double-slit interference Microgravity Acceleration Sensor Combining Detecting Displacement

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Embodiment Construction

[0027] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0028] refer to figure 1 and figure 2 , a low-g value double-slit interferometric MEMS microgravity measuring device, comprising a base 4, a boss on one side of the base 4 is connected with a sensitive element 2 and a CCD detector 3, and a boss on the other side is connected with a light source 1;

[0029] refer to image 3 , the base 4 is processed from a whole piece of glass, the boss on one side of the base 4 is provided with a CCD detector groove 13 and a sensitive element groove 11, and the CCD detector groove 13 and the sensitive element groove 11 are communicated through the light hole 12, The CCD detector groove 13 is provided with a detector limit stopper 14, a CCD detector 3 is installed in the CCD detector groove 13, and a sensitive element 2 is bonded and installed in the sensitive element groove 11; There is a light source hole 10, an...

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Abstract

The invention relates to a low-g value double-slit interferometric MEMS microgravity measuring device. The device comprises a base; a boss at one side of the base is connected with a sensitive component and a CCD detector, a boss at the other side of the base is connected with a light source; the sensitive component is integrally machined; the sensitive component comprises a mass block and a frameoutside the mass block; each of two sides of the upper end of the mass block is connected with the frame through one spring separately; one side of the lower end of the mass block is connected with the frame through one spring; two parallel slits are formed in the mass block; limiting stopping blocks on the frame are matched with the upper end and lower end of the mass block; the springs are of reverse spring structures; the sensitive component realizes a low-pass filtering function and a vibration amplifying function, and therefore, the sensitivity of the detection system can be improved, sensitivity measured by the sensitive component is increased by an order of magnitude compared with other types of MEMS sensors having the same geometric parameters with the sensitive component; double-slit interferometry is combined with MEMS technology, and therefore, the characteristics of small size and high processing accuracy realized with the MEMS technology adopted can be reserved, and at the same time, non-contact measurement and high-resolution photoelectric detection can be realized.

Description

technical field [0001] The invention relates to the technical field of acceleration sensors, in particular to a low-g value double-slit interferometric MEMS microgravity measuring device. Background technique [0002] Acceleration sensors are widely used in geological exploration, seismic monitoring, and aerospace fields. With industrial upgrading and iterative development of production processes, micro-electromechanical system (MEMS) acceleration sensors with small size, low energy consumption, and high precision are becoming more and more important to replace traditional Acceleration sensor has become the mainstream trend. According to the principle, MEMS acceleration sensors include photoelectric, capacitive, piezoresistive, resonant, etc., among which photoelectric acceleration sensors can be divided into grating type, optical cavity mechanical type, Fabry-Perot interference type, etc. according to the detection principle. The development of photoelectric detection tech...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01V7/00
Inventor 韦学勇张宏才蒋康力赵玉龙蒋庄德
Owner XI AN JIAOTONG UNIV
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