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Soft film replacement and nanoimprinting integrated equipment

A nano-imprinting and soft film technology, applied in optomechanical equipment, optics, instruments, etc., can solve problems such as not meeting demand, achieve high space utilization, improve efficiency, and improve moving range and moving speed.

Pending Publication Date: 2018-11-20
SUZHOU GUANGDUO MICRO NANO DEVICE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The soft film will be applied in the production process of nanoimprinting. The soft film is used repeatedly in the whole process, but the soft film also has a certain service life. If it is embossed 50 times or 100 times, its own function will not meet the demand. Needs to be replaced with a new soft film for continued imprinting

Method used

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  • Soft film replacement and nanoimprinting integrated equipment
  • Soft film replacement and nanoimprinting integrated equipment

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Embodiment Construction

[0029] Below in conjunction with specific embodiment, content of the present invention is described in further detail:

[0030] In order to achieve the purpose of the present invention, a soft film replacement and nano-imprint integrated equipment includes: soft film replication station 1; embossing station 6, several independent embossing stations 1 are used for nano-imprinting, Between the embossing station 6 and the soft film copying station 1, there are a tray storage area 3 and a soft film storage area 4; the stacking frame 10, the embossing station 6 is set as two rows, and the stacking frame 10 is pressed with one row. The printing stations 6 are flush, and the stacking rack 10 is equipped with a wafer storage area and a waste soft film storage area; the retrieving manipulator 5 is set in the middle of two parallel rows of embossing stations 6, and the reclaiming manipulator 5 puts the soft film storage area The soft film on 4 is matched with the carrier plate on the ca...

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Abstract

The invention discloses soft film replacement and nanoimprinting integrated equipment. The soft film replacement and nanoimprinting integrated equipment comprises a soft film copy station, imprintingstations, a lamination rack and a taking manipulator, wherein a plurality of imprinting stations are used for nanoimprinting, a carrying disc storage region and a soft film storage region are arrangedbetween the imprinting stations and the soft film copy station, two rows of the imprinting stations are arranged, the lamination rack is flush with one of the two rows of the imprinting stations, a wafer storage region and a waste soft film storage region are arranged on the lamination rack, the taking manipulator is arranged between the two rows of imprinting stations in parallel and is used forenabling a soft film on the soft film storage region to be matched with a carrying disc on the carrying disc storage region and sending the soft film and the carrying disc to the imprinting stationsafter matching, and the taking manipulator transfers between the imprinting stations and the wafer storage region and is also used for transferring a waste soft film on the imprinting stations to thesoft film storage region on the lamination rack. With the adoption of the soft film replacement and nanoimprinting integrated equipment, replacement of a new soft film and an old soft film is achieved, the equipment cost is low, each part is reasonable in layout, the operation efficiency is high, and the working strength of a worker is reduced.

Description

technical field [0001] The invention relates to nanoimprinting equipment, in particular to an integrated equipment for soft film replacement and nanoimprinting. Background technique [0002] The soft film will be applied in the production process of nanoimprinting. The soft film is used repeatedly in the whole process, but the soft film also has a certain service life. If it is embossed 50 times or 100 times, its own function will not meet the demand. It needs to be replaced with a new soft film to keep the imprint going. Contents of the invention [0003] The problem to be solved by the present invention is to provide an integrated soft film replacement and nano-imprinting equipment, which can replace old and new soft films, with low equipment cost, reasonable layout of components, high operating efficiency, and reduced labor intensity. [0004] In order to solve the above-mentioned problems, the present invention provides a soft film replacement and nano-imprint integra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00
CPCG03F7/0002
Inventor 刘晓成史晓华
Owner SUZHOU GUANGDUO MICRO NANO DEVICE
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