Dielectric barrier spark pre-ionization discharge electrode

A dielectric barrier and discharge electrode technology, which is applied in the direction of circuits, electrical components, laser components, etc., can solve the problem of destroying the uniformity of the electric field on the surface of the electrode, and achieve the reduction of metal dust pollutants, increase of life, and reduction of ablation degree Effect

Inactive Publication Date: 2018-11-30
中山普宏光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This structure makes holes on the electrode surface and destroys the uniformity of the electric field on the electrode surface.
On the other hand, with the increase of the number of discharges in this discharge mode, the part around the electrode hole will appear tree branch wear due to flash discharge, which further destroys the uniformity of the electric field on the electrode surface.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] A dielectric barrier spark pre-ionization discharge electrode, including a discharge anode 7, a discharge cathode 6, an insulating frame 5 and a cathode cover 3, the discharge cathode is located on the cathode cover 3, and the cathode cover outside the discharge cathode is installed There are pre-ionization bar 4 and insulating medium tube 2, spark needle 1 is installed in said insulating medium tube 2, and the tip of spark needle 1 does not touch the bottom of insulating medium tube 2.

[0037] The distance between the tip of the spark needle 1 and the bottom of the insulating medium tube 2 is 0.9mm.

[0038] The discharge cathode 6 is installed in the middle of the cathode cover plate 3, and the side of the discharge cathode 6 opposite to the discharge anode 7 is an arc-shaped protrusion.

[0039] The insulating medium tube 2 is parallel to the pre-ionization strip 4 , and the insulating medium tube 2 and the pre-ionization strip 4 are installed on both sides of the c...

Embodiment 2

[0045] A dielectric barrier spark pre-ionization discharge electrode, comprising a discharge anode 7, a discharge cathode 6, an insulating frame 5, a cathode cover plate 3, a pre-ionization strip 4 and an insulating dielectric tube 2 are installed on the cathode cover plate 3, and the insulating A spark needle 1 is installed in the medium pipe 2, and the tip of the spark needle 1 does not touch the bottom of the insulating medium pipe 2.

[0046] The distance between the tip of the spark needle 1 and the bottom of the insulating medium tube 2 is 1.5mm.

[0047] The discharge cathode 6 is installed in the middle of the cathode cover plate 3, and the side of the discharge cathode 6 opposite to the discharge anode 7 is an arc-shaped protrusion.

[0048] The insulating medium tube 2 is parallel to the pre-ionization strip 4 , and the insulating medium tube 2 and the pre-ionization strip 4 are installed on both sides of the cathode cover plate 3 in parallel. The pre-ionization bar...

Embodiment 3

[0054] A dielectric barrier spark pre-ionization discharge electrode, comprising a discharge anode 7, a discharge cathode 6, an insulating frame 5, a cathode cover plate 3, a pre-ionization strip 4 and an insulating dielectric tube 2 are installed on the cathode cover plate 3, and the insulating A spark needle 1 is installed in the medium pipe 2, and the tip of the spark needle 1 does not touch the bottom of the insulating medium pipe 2.

[0055] The distance between the tip of the spark needle 1 and the bottom of the insulating medium tube 2 is 3.0mm.

[0056] The discharge cathode 6 is installed in the middle of the cathode cover plate 3 , and the discharge cathode 6 has the same shape as the discharge anode 7 .

[0057] The insulating medium tube 2 and the pre-ionization strip 4 are installed side by side on the outside of the cathode cover plate 3 , there are two insulating medium tubes 2 , and the pre-ionization strip 4 is located in the middle of the two insulating mediu...

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PUM

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Abstract

The invention discloses a dielectric barrier spark pre-ionization discharge electrode, comprising a discharge anode, a discharge cathode, an insulation frame, and a cathode cover plate, wherein pre-ionization strips and insulating medium tubes are mounted on the cathode cover plate, a spark needle is arranged in the insulating medium tube, the tip of the spark needle does not touch the bottom of the insulating medium tube, and the spark needle is turned on for being incapable of direct discharge with the pre-ionization strip. In the invention, the spark needle is only used as an electric conductor and does not directly perform spark discharge, so that the degree of ablation of the spark needle is greatly reduced, the service life thereof is correspondingly increased, and metal dust pollutants are correspondingly reduced.

Description

technical field [0001] The invention belongs to the technical field of gas lasers, in particular to a structure for an excimer laser pre-ionization discharge electrode. Background technique [0002] The laser pulse energy output energy of a gas laser depends largely on the degree of pre-ionization of the gas medium, that is, the distribution and level of electron concentration in the initial stage of discharge development. The two most commonly used preionization schemes are corona preionization and free spark preionization. The initial electron concentration generated by corona pre-ionization is low, which is suitable for uniform glow discharge with small area and high repetition rate. Free spark preionization can produce higher initial electron concentration and is often used in large area uniform glow discharge. The free spark pre-ionization structure is that a certain number of spark needles are evenly arranged on both sides of the electrode length direction, and a pre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/038H01S3/03
CPCH01S3/03H01S3/0381H01S3/0382
Inventor 朱能伟梁勖游利兵方晓东
Owner 中山普宏光电科技有限公司
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