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Soft template demoulding mechanism

A technology of demolding mechanism and soft template, applied in optomechanical equipment, optics, instruments, etc., can solve the problems of soft template pollution, damage, low efficiency, etc., and achieve the effect of ensuring imprint quality and simple mechanism structure.

Active Publication Date: 2018-12-07
SUZHOU GUANGDUO MICRO NANO DEVICE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the prior art, after the soft template is produced and prepared, it is necessary to manually remove the soft template from the mother template, which is inefficient and will cause pollution and damage to the soft template

Method used

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Embodiment Construction

[0029] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0030] In order to achieve the purpose of the present invention, in some embodiments of a soft template demoulding mechanism,

[0031] A soft template demoulding mechanism, used to separate the soft template from the mother template, comprising: a frame 1 and an adsorption plate 2, the adsorption plate 2 is arranged on the frame 1, and the adsorption surface 21 of the adsorption plate 2 is provided with multiple A suction nozzle 22, a plurality of suction nozzles 22 are connected with a vacuum device (not shown in the figure), and the suction surface 21 of the suction disk 2 is an inclined plane.

[0032] A soft formwork demoulding mechanism of the present invention has a simple structure, and adopts the adsorption plate 2 with a slope to start to remove the soft formwork from the edge of the soft formwork. damage, and the vacuum extraction ...

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Abstract

The invention discloses a soft template demoulding mechanism. The soft template demoulding mechanism is used for removing soft templates from a cavity plate, and comprises a machine frame, and an adsorption disc arranged on the machine frame; an adsorption surface of the adsorption disc is provided with a plurality of adsorption nozzles; the adsorption nozzles are connected with a vacuum-pumping device; and the adsorption surface of the adsorption disc is designed to be an inclined plane. The soft template demoulding mechanism is simple in structure; the soft templates are peeled from the edges, so that pollution or damage of the soft templates is avoided, and the working efficiency is high.

Description

technical field [0001] The invention relates to a soft template preparation device, in particular to a soft template demoulding mechanism. Background technique [0002] Nanoimprint technology is an important technology in the manufacturing process of micro-nano devices. Nanoimprint technology was first proposed by Professor Stephen Y Chou in 1995. It is a new pattern transfer technology different from traditional lithography technology. The definition of nanoimprint technology is: instead of using light or radiation to photosensitively shape the photoresist, it directly constructs nanometer-sized patterns on silicon substrates or other substrates using physical mechanisms. [0003] Soft template is a simple and convenient nano-imprint template replication material. It is usually made by mixing body material and curing agent in a certain proportion. After removing air bubbles, it is poured on the surface of the master template and cured by heating to form a working template o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00
CPCG03F7/0002
Inventor 刘晓成史晓华
Owner SUZHOU GUANGDUO MICRO NANO DEVICE