Thin film transistor, preparation method thereof and sensor

Abstract

The application provides a thin film transistor, a preparation method thereof and a sensor. Wherein, the thin film transistor comprises a substrate and a gate, a gate insulating layer, a source, a drain, and an active layer arranged on the substrate; wherein, a microchannel is arranged in the active layer, and the thin film transistor is used for detecting samples in the microchannel. According tothe technical solution of the thin film transistor, the preparation method thereof and the sensor, the microchannel is arranged in the active layer of the thin film transistor TFT, when the samples to be tested enter the microchannel, the distribution of electrons in the active layer is affected, and the fluctuations in TFT characteristics are caused, so that the technical effect of detecting thecomposition and properties of the liquid to be tested can be realized by detecting fluctuations in TFT characteristics. Further, with the help of the microchannel, the samples can be precisely controlled, on the one hand, the influence of the external environment is reduced, and the detection precision is improved; on the other hand, continuous monitoring of the samples can be achieved instead ofone-time detection, the efficiency of sample detection is improved.

Description

technical field [0001] The invention relates to the technical field of detection, in particular to a thin film transistor, a preparation method thereof, and a sensor. Background technique [0002] In recent years, sensors based on thin film transistor TFT devices have been gradually developed. When the samples to be tested, such as biological, chemical, and medical samples, come into contact with TFT, the characteristics of TFT will fluctuate. By detecting and analyzing the fluctuation of TFT characteristics, the detection of biological, chemical, medical and other sample reagents can be achieved, such as protein detection, DNA detection and so on. [0003] However, in the prior art, the sample to be tested is usually dropped onto the surface sensing area of ​​the TFT. Due to the influence of the external environment such as air and humidity during the detection process, the measurement results are not accurate enough, and such a measurement method It can only be detected ...

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Problems solved by technology

[0003] However, in the prior art, the sample to be tested is usually dropped onto the surface sensing area of ​​the TFT. Due to the influence of the external environment such as air and humidity during the detection process, the measurement result is not accurate enough, and this measurement method It can only be detected instantaneously and cannot be continuously monitored, resulting in low sample detection efficiency

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