Double-layer grid mesh spherical secondary electronic collector

A technology of secondary electrons and collectors, applied in the direction of material analysis using measurement of secondary emissions, can solve problems such as adverse effects, test errors, and secondary electrons cannot be collected, achieve shielding interference, improve receiving efficiency, reduce The effect of signal distortion

Active Publication Date: 2018-12-28
INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

Since the secondary electrons emitted from the surface of the sample have an angular distribution in the 2π space, the secondary electrons with a larger emission angle will not be effectively received by the flat-panel detector, resulting in test errors; although the barrel-shaped or hemispherical secondary electron collector It can overcome the deficiency that the flat-type secondary electron collector cannot effectively receive the secondary electrons with a large exit angle, but like

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  • Double-layer grid mesh spherical secondary electronic collector
  • Double-layer grid mesh spherical secondary electronic collector
  • Double-layer grid mesh spherical secondary electronic collector

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[0024] In order to be able to understand the above-mentioned objectives, features and advantages of the present invention more clearly, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other if they do not conflict with each other.

[0025] In the following description, many specific details are explained in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from the scope described here. Therefore, the protection scope of the present invention is not disclosed below. Limitations of specific embodiments.

[0026] Such as figure 1 Shown is the overall side view of the double-layer grid tennis-shaped secondary electron collector. The double-layer grid tennis-shaped secondary electron collector is...

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Abstract

The invention discloses a double-layer grid mesh spherical secondary electronic collector. The double-layer grid mesh spherical secondary electronic collector comprises a spherical grounding grid mesh, a spherical bias grid mesh, a spherical secondary electronic collector and a spherical ground shielding electrode which are arranged from inside to outside; a hole used for guiding an incident electron beam is formed in the top of the upper half sphere, and the bottom of the lower half sphere is provided with a hole used for sending a tested sample to the center of the secondary electronic collector through a sample test carrying table; the two layers of spherical grid meshes and the two layers of spherical electrodes are insulated from each other, and the inner layer spherical grid mesh isgrounded, and is used for shielding an electric field introduced by the bias spherical grid mesh; the outer layer spherical grid mesh is connected with a bias voltage power source, and the recognizingof the true secondary electrons and the back scattering electrons is realized through switching of positive and negative bias voltages; and the outer-layer spherical grid mesh is connected with a negative voltage source with an adjustable voltage, and energy screening can be carried out on the secondary electrons through the outer-layer spherical grid mesh; and the collector can improve the secondary electron collection efficiency, and interference to the tested signal can be lowered, so that the measurement accuracy of the secondary electron emission characteristic of a solid material is improved.

Description

technical field [0001] The invention relates to the field of electron collectors, in particular to a double-layer grid ball-shaped secondary electron collector. Background technique [0002] When an electron beam with a certain energy bombards a solid material, electrons will be emitted from the surface of the material. This phenomenon is called the secondary electron emission phenomenon of solid materials. The ratio of the number of secondary electrons emitted by the material surface to the initial incident electrons is called the secondary electron emission coefficient, which is a characteristic surface parameter of the material. The secondary electron emission process has been widely used in various surface analysis equipment such as electron multiplier tubes and scanning electron microscopes. As well as adverse effects on the reliability of electric vacuum devices, accurate measurement of secondary electron emission characteristics of solid materials is a very important...

Claims

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Application Information

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IPC IPC(8): G01N23/22
CPCG01N23/22
Inventor 何佳龙龙继东彭宇飞李杰杨振刘平王韬李喜董攀蓝朝晖郑乐刘尔祥赵伟杨洁石金水
Owner INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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