A kind of hard ceramic coating with antibacterial and corrosion resistance and preparation method thereof

A hard ceramic, corrosion-resistant technology, applied in coatings, metal material coating processes, vacuum evaporation plating, etc., can solve the problems of small protection range and no corrosion resistance of the protective layer, and achieve excellent mechanical behavior and high performance. The effect of improving hardness and corrosion

Active Publication Date: 2020-05-12
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Similarly, the protective layer has no corrosion resistance, and the protection range is small

Method used

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  • A kind of hard ceramic coating with antibacterial and corrosion resistance and preparation method thereof
  • A kind of hard ceramic coating with antibacterial and corrosion resistance and preparation method thereof
  • A kind of hard ceramic coating with antibacterial and corrosion resistance and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0069] (1) Clean the polished 304 stainless steel substrate, put in successively a concentration of 60% decontamination powder aqueous solution, saturated Na 2 CO 3 Water solution, acetone, absolute ethanol, and deionized water were ultrasonically cleaned for 15 minutes, and then dried with high-purity nitrogen gas with a purity of 99.99%. Then, the substrate was placed on the sample stage in the vacuum chamber. -3 After Pa, inject argon gas and maintain the pressure at 0.5 Pa, then turn on the power supply and apply a negative bias voltage to the substrate at the same time, and use the plasma glow generated by argon to etch and clean it for 15 minutes;

[0070] (2) Zr 58 Cu 30 al 12 The target is connected to the DC power supply, the Cu target is connected to the RF power supply, and the purity of the two targets is greater than 99.9%;

[0071] (3) Put the cleaned substrate into the vacuum chamber, when the vacuum degree of the chamber is ≤5×10 -5 Pa, pass into Ar and N ...

Embodiment 2

[0078] Prepare hard ceramic coating according to the method described in Example 1;

[0079] Wherein, the specific parameters in step (3) are: Cu target power density: 4.15W / cm 2 ; Zr 58 Cu 30 al 12 Target power density: 4.15W / cm 2 ; The flow ratio of nitrogen to argon is N 2 : Ar=0.18; substrate bias: -8V; heating temperature: 200°C; coating deposition rate: 25nm / min.

[0080] Structural characterization of the obtained coating: it is found that the composition of the coating obtained in Example 2 is Zr 43.1 Cu 18.8 al 5.2 N 32.9 , showing as figure 1 and figure 2 (b) shows a two-phase composite structure of ZrN crystal grains surrounded by amorphous, wherein the ZrN grain size is 6-15 nm, and the amorphous phase thickness of two adjacent ZrN grains is 10-25 nm.

[0081] Such as image 3 The XPS of (b-1) and the Auger spectrum of 3 (b-2) show that the Cu element on the surface of the coating is +1 valence. Further observation of the cross-sectional morphology of...

Embodiment 3

[0085] Prepare hard ceramic coating according to the method described in Example 1;

[0086] Wherein, the specific parameters in step (3) are: Cu target power density: 3.24W / cm 2 ; Zr 58 Cu 30 al 12 Target power density: 3.65W / cm 2 ; The flow ratio of nitrogen to argon is N 2 : Ar=0.06; substrate bias: -10V; heating temperature: 150°C; coating deposition rate: 30nm / min.

[0087] Structural characterization of the obtained coating: it is found that the composition of the coating obtained in Example 1 is Zr 39.1 Cu 18.0 al 4.8 N 38.1 , showing as figure 1 In the shown two-phase composite structure of amorphous ZrN crystal grains, the size of ZrN grains is 10-15 nm, and the thickness of the amorphous phase between two adjacent ZrN grains is 10-30 nm.

[0088] XPS and Auger spectra show that the Cu element on the surface of the coating is +1 valence. The cross-sectional morphology of the coating was further observed with an electron microscope. There were no columnar cr...

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Abstract

The invention discloses a hard ceramic coating with antibacterial and anticorrosive performance. The constitution of the coating is ZrxCuyAlzN100-x-y-z, x is equal to 39.1 to 45.1, y is equal to 17.5to 18.8, z is equal to 4.8 to 7.2, x, y and z is atomic ratio, Cu is an amorphous structure and exists in the form of Cu<+>, and the coating is formed by compounding two phases, i.e. a ZrN crystal phase and an amorphous phase. The invention also discloses a preparation method of the hard ceramic coating. The hard ceramic coating is prepared by adopting a physical vapor magnetic control sputteringmethod. The preparation method specifically comprises the following steps: cleaning a matrix, connecting a power supply, and depositing a coating; and the obtained coating is high in hardness, good inbinding force, easy in releasing sterilizing substances, high in corrosion resistance, and capable of providing effective antibacterial and anticorrosive protection for articles.

Description

technical field [0001] The invention belongs to the field of protective coatings, in particular to a hard ceramic coating with antibacterial and corrosion resistance properties and a preparation method thereof. Background technique [0002] Physical vapor deposition coating, referred to as PVD coating, is widely used as a protective coating because of its good wear resistance, high hardness, and high bonding force to improve the service life of components. However, with the improvement of people's living standards With the improvement of people's requirements for the protective performance of the coating, people pay more and more attention to the cleaning of the home environment in daily life. People not only require the coating to have excellent corrosion resistance, but also need The coating has good antibacterial properties. [0003] The kitchen, bathroom and other environments in human residences are places where bacteria are most likely to breed and are most likely to ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/34
CPCC23C14/0036C23C14/0641C23C14/34
Inventor 黄峰李朋葛芳芳吴玉美
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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