Novel regular dodecagonal annular resonant micro-mechanical gyroscope

Abstract

The invention discloses a regular dodecagonal annular resonant micro-mechanical gyroscope structure, and belongs to the field of micro-sensors. According to the regular dodecagonal annular resonant micro-mechanical gyroscope structure, the advantages of an annular resonant gyroscope are completely reserved, and the problems that the resonance frequency of the annular gyroscope is relatively high and deviation angles between a main damping direction in a working mode that n is equal to 3, and driving and sensitive axes are relatively large are solved; and meanwhile, the detection capacitance isexpanded, so that the sensitivity can be improved. The gyroscope structure sequentially comprises a base silicon body, an anchor point and a device layer; the gyroscope structure is characterized inthat the device layer comprises a regular dodecagonal annular structure, spokes, a center support and electrodes; and the device layer is suspended on the base silicon body through the center support.

Description

technical field [0001] The invention relates to a regular twelve-sided ring resonant micro-mechanical gyroscope structure, which belongs to the field of micro-sensors. Background technique [0002] With the development of science and technology and the progress of society, consumer electronics, automotive products, and guided weapons have further increased the requirements for the accuracy and reliability of micro-mechanical gyroscopes, which promote the continuous production of micro-mechanical gyroscopes with new structures and new principles, among which ring resonance The micromechanical gyroscope has the advantages of high precision, high reliability and long life, and has become one of the new gyroscopes that have been studied in recent years. [0003] The structure of the ring resonant micromechanical gyroscope has the following advantages: 1. The fully symmetrical resonant structure makes it insensitive to disturbances and unwanted vibrations in the environment, and ...

AI Technical Summary

Problems solved by technology

[0004] Patent CN 102388292 A proposes a ring-shaped resonant micromechanical gyroscope, which is free from the influence of external temperature and stress, and can achieve extremely high sensitivity and quality factor, but its high resonance frequency is not conducive to detection, and its main damping The deviation angle between the direction and the driving and sensitive axes is relatively large, so the present invention provides a new positive dodecagonal ring resonant micro-mechanical gyroscope structure, which solves the above problems and increases the detection capacitance, which is conducive to improving the sensitivity

Images