Distortion Error Compensation Method Caused by f-theta Focusing Lens
A focusing lens and error compensation technology, applied in the field of distortion error compensation, can solve problems such as reasonable analysis of errors
Active Publication Date: 2020-10-09
UNIV OF SHANGHAI FOR SCI & TECH
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[0004] The present invention aims at the limitation of the fθ model and the OEF graphic algorithm, and the problem that the error caused by the change of the optical path behind the F-theta focusing lens cannot be reasonably analyzed, and a distortion error caused by the F-theta focusing lens is proposed Compensation method, aiming at the barrel distortion caused by adding F-theta focusing lens, research the distance of GH after the beam is mapped from the path BDFG to the coordinate plane, through this distance and the direction vector of BD (calculated by the deflection angle of the galvanometer and the geometric relationship ) to calculate the mapping coordinate value of point G, and then the mathematical relationship between the computer digital control amount, the deflection angle of the galvanometer and the mapping coordinate value can be obtained
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[0052] figure 1 Shown is a schematic diagram of the two-dimensional optical path of the beam passing through the F-theta focusing lens. Due to the high symmetry of the optical path, it can be seen that the three-dimensional is still valid. When the beam passes through the F-theta focusing lens, it will be refracted twice due to two curved surfaces. B-D-F-G is the actual path of the beam; A is the intersection point of the extension line of PD and the transverse centerline IC (Z axis) of the focusing lens; ID is the curvature radius of the left curved surface; N is the intersection point of the extension line of ID and the longitudinal centerline ON of the focusing lens; DE is the distance from the incident point D to the transverse centerline IC of the focusing lens; FM is the distance from the exit point F to the GH axis (Y axis) of the light screen, as on the light screen surface XHY; CF is the radius of curvature of the right curved surface, and P is the extension of CF The...
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The invention relates to a compensation method of a distortion error caused by an F-theta focusing lens. For barrel-shaped distortion caused by adding the F-theta focusing lens, a test light path is built, the GH distance of a light beam after mapping from a path BDFG to a coordinate plane is researched, and a mapping coordinate value of a G point is calculated through the GH distance and a direction vector (calculated through a galvanometer deflection angle and a geometric relation) of BD, so that the mathematical relation between a computer digital control quantity and the galvanometer deflection angle and the mapping coordinate value can be obtained. A model is used for finding the relationship between the computer digital control quantity and the mapping coordinate value, and in actualapplication, the compensation effect can be achieved by modifying the input computer digital control quantity.
Description
technical field [0001] The invention relates to an error processing technology, in particular to a compensation method for distortion error caused by an F-theta focusing lens. Background technique [0002] In recent years, double-galvanometer laser scanning processing technology has become more and more popular. Its processing efficiency is high and its processing accuracy is good. Therefore, this technology is becoming more and more popular. In order to achieve higher processing accuracy, it is necessary to study the distortion error of this technology. Through the analysis and summary, we found that the obvious errors include the error caused by the nonlinearity of the mapping relationship, the error caused by adding the F-theta focusing lens, and the error caused by the bias of the scanning mirror. After experiments, it was found that the error caused by the F-theta focusing lens was compared obvious. [0003] In view of this, some scholars use the f-θ mathematical model...
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IPC IPC(8): G02B26/10G02B27/00
CPCG02B26/101G02B27/0012
Inventor 陈光胜项汉桢
Owner UNIV OF SHANGHAI FOR SCI & TECH