An orthotropic piezoelectric ceramic actuator

Abstract

The invention relates to an orthotropic piezoelectric ceramic actuator, comprises a circular piezoelectric ceramic substrate and a piezoelectric ceramic substrate covered with the circular piezoelectric ceramic substrate, an electrode on the lower surface, A low surface electrode and an upper surface electrode are arranged symmetrically with respect to an intermediate surface in that thickness direction of the piezoelectric ceramic, the electrodes on each surface comprise an electrode 1 and an electrode 2, the electrode 1 and the electrode 2 are fan-shaped interdigital electrodes, the electrodes 1 and 2 on the same surface are arranged in a cross arrangement with each other, A surface of that piezoelectric ceramic is for with two fan-shaped electrode regions, As that angle of the electroderegion can be adjust according to the actuation range of the actuator, The directional angle can be adjusted according to the actuation direction of the actuator, and the large displacement output inthe specific direction or the stress wave signal with high energy generated in the specific direction can be realized by the invention, especially suitable for the micro-actuation field, so that theprecision can be improved and the realization difficulty of the precision equipment can be reduced.

Description

technical field [0001] The invention relates to the field of piezoelectric ceramic driving technology, in particular to an orthotropic piezoelectric ceramic driver. Background technique [0002] With the rapid development of modern industry, the requirements for high-precision mechanical engineering micro-drivers are getting higher and higher; piezoelectric ceramic drives have the advantages of high resolution, fast response, small size, and large driving force, and have been widely used in the field of micro-drives application. However, the commonly used piezoelectric ceramic driver works in the d31 mode. Due to the small driving displacement, the piezoelectric ceramic driver array must be used, or the method of increasing the external power supply voltage is used to increase the output of the driver, and the structure is complicated; at the same time, due to the in-plane The isotropic characteristics of piezoelectric ceramics generate stress waves of equal intensity in al...

AI Technical Summary

Problems solved by technology

[0003] Aiming at the defects of small driving force and poor driving directionality of piezoelectric ceramic drivers in the prior art, the purpose of the present invention is to provide an orthotropic piezoelectric ceramic driver, which can obtain a larger micro-scale by using a larger piezoelectric constant d33 Displacement and driving force, at the same time have the characteristics of orthotropy, strong directionality

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