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An Orthotropic Piezoelectric Actuator

A piezoelectric ceramic and orthotropic technology, applied in the field of orthotropic piezoelectric ceramic drives, can solve the problems of small driving force and poor driving directionality, and achieve the effects of low cost, simple manufacturing process and strong practicability

Active Publication Date: 2022-05-10
HENAN UNIV OF SCI & TECH
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Problems solved by technology

[0003] Aiming at the defects of small driving force and poor driving directionality of piezoelectric ceramic drivers in the prior art, the purpose of the present invention is to provide an orthotropic piezoelectric ceramic driver, which can obtain a larger micro-scale by using a larger piezoelectric constant d33 Displacement and driving force, at the same time have the characteristics of orthotropy, strong directionality

Method used

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  • An Orthotropic Piezoelectric Actuator
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Embodiment Construction

[0025] The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.

[0026] The orthotropic piezoelectric ceramic driver of the present invention includes a piezoelectric ceramic substrate 1 and electrodes covering the upper and lower surfaces of the piezoelectric ceramic substrate, and the electrodes on each surface include electrodes one (2, 4) and electrodes two ( 3, 5), the lower surface electrode and the upper surface electrode are completely symmetrically arranged relative to the middle plane of the piezoelectric ceramic thickness direction, the upper surface electrode one 2 and the lower surface electrode one 4 are connected to form an electrode pair I, and the upper surface electrode two 3 and the lower surface electrode are connected. Surface electrodes 2 and 5 are connected to form electrode pair II. Electrodes 1 (2, 4) and electrodes 2 (3, 5) are both sector-shaped interdigitated electrodes, an...

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Abstract

The invention relates to an orthotropic piezoelectric ceramic driver, comprising a circular piezoelectric ceramic substrate and electrodes covered on the upper and lower surfaces of the piezoelectric ceramic substrate. The surface is completely symmetrically arranged. The electrodes on each surface include electrode one and electrode two. Both electrode one and electrode two are fan-shaped interdigitated electrodes. Two fan-shaped electrode areas are formed on the surface. The angle of the electrode area can be adjusted according to the operating range of the driver, and the direction angle can be adjusted according to the operating direction of the driver. The invention can realize large displacement output in a specific direction or generate high displacement in a specific direction. The energy stress wave signal is especially suitable for the field of micro-drive, which can improve the precision and reduce the difficulty of realizing precision equipment.

Description

technical field [0001] The invention relates to the technical field of piezoelectric ceramic drive, in particular to an orthotropic piezoelectric ceramic drive. Background technique [0002] With the rapid development of modern industry, the requirements for high-precision mechanical engineering micro-drivers are getting higher and higher; piezoelectric ceramic drivers have the advantages of high resolution, fast response, small size and large driving force, and have been widely used in the field of micro-driving. application. However, the commonly used piezoelectric ceramic driver works in the d31 mode. Due to the small driving displacement, the piezoelectric ceramic driver array must be used, or the external power supply voltage must be increased to increase the output of the driver, and the structure is complex; at the same time, due to the in-plane The isotropic characteristics of piezoelectric ceramics produce equal-intensity stress waves in all directions of the drive...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/047H01L41/09H01L41/29H10N30/87H10N30/06H10N30/20
CPCH10N30/87H10N30/206H10N30/06
Inventor 刘永刚曹胜捷吴舟贾其苏张婷张浩男郭全圆
Owner HENAN UNIV OF SCI & TECH
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