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A device and method for stratified counting of quartz crucible bubbles

A technology of quartz crucible and counting method, which is applied in calculation, image analysis, image data processing, etc., can solve the problems of error-prone, test result accuracy, time-consuming, etc., and achieve simple operation, simple structure, and low input cost. Effect

Active Publication Date: 2021-10-01
赵谦
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, people mainly check and judge the detection results manually, but people are easily affected by various factors such as subjective quality, personal emotion, vision, etc.
Manual detection is not only time-consuming, but also prone to errors, which has a great impact on the accuracy of test results

Method used

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  • A device and method for stratified counting of quartz crucible bubbles
  • A device and method for stratified counting of quartz crucible bubbles
  • A device and method for stratified counting of quartz crucible bubbles

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Embodiment Construction

[0076] like figure 1 A kind of quartz crucible bubble stratification counting device shown, comprises data processing controller 1, micro-projector and the image acquisition device connected with data processing controller 1, and described image acquisition device comprises mechanical arm 2 and is clamped on The electronic magnifying glass 3 on the mechanical arm 2, the electronic magnifying glass 3 and the mechanical arm 2 are connected to the data processing controller 1, and the light projected by the micro projector is blue-violet light.

[0077] In this embodiment, the data processing controller 1 is a computer.

[0078] In this embodiment, the mechanical arm 2 is a six-degree-of-freedom mechanical arm, the magnification range of the electronic magnifying glass 3 is 1 to 500 times, and the electronic magnifying glass 3 communicates with the data processing controller 1 through a USB transmission line. Next, the mechanical arm 2 is controlled by the data processing contro...

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Abstract

The invention discloses a stratified counting device and method for quartz crucible bubbles. The device includes a data processing controller, a micro projector and an image acquisition device. The image acquisition device includes a mechanical arm and an electronic magnifying glass. The micro projector projects The light is blue-violet light; the method comprises the following steps: 1. collection and transmission of quartz crucible images; 2. denoising and equalization of quartz crucible enlarged images; 3. stratification of quartz crucible bubble images; 4. stratification of quartz crucible bubble images Image bubble contour acquisition. The invention has a reasonable design, obtains the bubble image of the transparent layer in the quartz crucible through an electronic magnifying glass, and performs layered processing on the bubble image, so as to judge whether the production process of the quartz crucible reaches the standard, saves manpower, material resources and financial resources, and improves the inspection efficiency of the quartz crucible. degree of automation.

Description

technical field [0001] The invention belongs to the technical field of bubble detection in a quartz crucible, and in particular relates to a layered counting device and method for bubbles in a quartz crucible. Background technique [0002] Quartz crucibles are widely used in many important fields, especially in single crystal silicon for manufacturing semiconductor electronic components, quartz crucibles are the main equipment, and the bubbles in the transparent layer of quartz crucibles greatly affect the crystal pulling results, so It is extremely important to select an experimental quartz crucible with a small number of bubbles. The cross-section of the quartz crucible usually has a double-layer structure: the inner layer is colorless, called the transparent layer, characterized by transparency, less bubble content, spherical and evenly distributed bubbles; the outer layer is white, called the opaque layer, characterized by It is opaque and contains a lot of bubbles, and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06T7/13G06T7/136
CPCG06T7/13G06T7/136
Inventor 赵谦史凌云李蓉蓉李小龙唐振华
Owner 赵谦
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