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Cleaning method

A workpiece surface and workpiece technology, applied in the field of surface treatment, can solve problems such as easily damaged parts, achieve the effect of improving efficiency and protecting the workpiece itself

Inactive Publication Date: 2019-04-09
SHENZHEN SHISHANG ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a cleaning method, which aims to solve the problem that the traditional method of removing deposits is easy to damage the parts themselves

Method used

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Embodiment Construction

[0040] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention is capable of being implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0041] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used here...

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Abstract

The invention relates to a cleaning method. The cleaning method comprises the following steps that deposit sediment on the surface of a workpiece is removed through a water jet scalpel; sand blastingtreatment is performed on the surface of the workpiece; the surface of the workpiece is cleaned comprehensively; and the workpiece is dried. According to the cleaning method, the water jet scalpel isadopted and does not affect the physical and chemical properties of the workpiece, therefore, by removing the deposit sediment on the surface of the workpiece through the water jet scalpel, the workpiece can be protected, and the deposit sediment removing efficiency can be improved.

Description

technical field [0001] The invention relates to the technical field of surface treatment, in particular to a cleaning method. Background technique [0002] With the continuous development of the semiconductor and LCD panel industries, my country's semiconductor industry and LCD panel industry have been greatly improved, and the industry's production capacity is also getting higher and higher. Industries such as semiconductors and liquid crystal display panels are refined industries, and many processes are carried out in vacuum equipment, which requires the parts of vacuum equipment to maintain good performance in absorbing the deposits generated during the production process. Therefore, it is necessary to treat these Parts are regularly maintained to ensure production accuracy. [0003] Usually, when maintaining these parts, it is necessary to remove the deposits adhering to the surface of the parts. In the traditional technology, most of the deposits are removed by soaking...

Claims

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Application Information

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IPC IPC(8): B08B3/02B08B3/12B08B5/02B24C1/00B24C1/04B24C1/08B24C11/00C23G1/08C23G1/12
CPCB08B3/02B08B3/12B08B5/02B24C1/00B24C1/04B24C1/08B24C1/083B24C11/00C23G1/086C23G1/125
Inventor 张远熊志红
Owner SHENZHEN SHISHANG ELECTRONICS TECH
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