Evaporation device, evaporation adjustment method and computer-readable medium

Abstract

The invention discloses an evaporation device, an evaporation adjustment method and a computer-readable medium, so as to improve the problem that the evaporation process of the prior art has reduced detection accuracy due to long-term use of a film detection device, thereby causing abnormal film thickness of the evaporation. The evaporation device comprises at least one evaporation source, a firstrate detection part, a second rate detection part and a control part, wherein the control part is used for controlling the first rate detection part to detect the first evaporation rate of the corresponding evaporation source in real time, and determining the corresponding actual evaporation power, and for the evaporation source of which the determined actual evaporation power does not match theempirical vapor evaporation power, controlling the second rate detection part to detect a second evaporation rate of the evaporation source, and adjusting the evaporation rate of the evaporation source according to the second evaporation rate when it is determined that a difference between the first evaporation rate and the second evaporation rate of the evaporation source exceeds a preset range.

Description

technical field [0001] The present invention relates to the technical field of semiconductors, in particular to an evaporation device, an evaporation adjustment method, and a computer-readable medium. Background technique [0002] At present, the film thickness detectors used in the OLED evaporation industry mainly use the piezoelectric effect and mass loading effect of a quartz crystal microbalance (QuartzCrystal Microbalance, QCM for short). Within the safe use range of QCM, it can reflect the evaporation rate (rate) of the evaporation process relatively accurately, and then accurately control the thickness of the evaporation film. However, as the evaporation time increases, more materials deposited on the QCM will affect the rate of QCM detection, resulting in abnormal evaporation film thickness. [0003] That is, in the vapor deposition process of the prior art, the detection accuracy decreases due to the long-term use of the film layer detection device, which in turn l...

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Problems solved by technology

[0004] The present invention provides an evaporation device, an evaporation adjustment method, and a computer-readable medium, so as to improve the evaporation process of the prior art. Due to the long-term use of the film layer detection device, the detection accuracy decreases, which in turn leads to abnormal film thickness of the evaporation. The problem

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