Microwave interference diagnosis method based on fluid model

Abstract

The invention discloses a method belonging to the technical field of low temperature plasma simulation methods, in particular to a microwave interference diagnosis method based on a fluid model. The microwave interference diagnosis method employs a microwave vector network analyzer, a coaxial cable, an antenna, a microwave anechoic chamber, a power supply connection hole, an external port and a plasma, and is characterized in that: the left side wall of the microwave vector network analyzer is electrically connected with the coaxial cable. The electron density diagnosis method is applicable toa low-temperature plasma of a wave transparent cavity, combines numerical simulation and wave interference methods, studies a microwave single / double end reflection interference diagnosis method based on the fluid model for cavity structures of two kinds of wave transparent cavity plate inductively coupled with a plasma discharge power source, can measure the phase shift amount of the thin layerplasma more precisely, and can utilize the situation that the central axis position of the antenna needs to be moved when a microwave diagnosis method is adopted since the plasma shows significant unevenly distributed phenomena during discharge, thereby maximizing the phase shift amount.

Description

technical field [0001] The invention relates to the technical field of microwave interference, in particular to a microwave interference diagnosis method based on a fluid model. Background technique [0002] At present, the development of numerical simulation methods is relatively rapid. Some literatures have carried out inductively coupled plasma sources through particle simulation-Monte Carlo method PIC / MC (Particle In Cell / Monte Carlo), hydrodynamic modeling and hybrid modeling. Numerical simulation, a large number of numerical simulation results show that under the premise of given accurate electron energy distribution function (EEDF), reaction rate and diffusion coefficient, the fluid model can accurately calculate n e The distribution changes with the external discharge conditions, but because the secondary factors and power loss are often ignored in the numerical simulation, the numerical simulation results are higher than the experimental measurement values. to n e...

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Problems solved by technology

[0003] The object of the present invention is to provide a microwave interference diagnosis method based on a fluid model, to solve the problems in the above-mentioned background technology because secondary factors and power loss are often ignored in the numerical simulation, resulting in numerical simulation results higher than the experimental measurement value, which is relatively than spectroscopic and probe methods, although to some extent solve the problem of wave interferometry on n e diagnostics of spatial distribution, but it is difficult to solve the diffusion equation for different, fixed n e The contour function cannot reflect the influence of external discharge conditions on the distribution

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