A Finite Conjugate Optical System with Equidistant Object and Image

An optical system and conjugate technology, applied in the field of optical systems, can solve the problems of small measurement range and single type of measurement workpiece, and achieve the effect of large measurement range and elimination of coma

Active Publication Date: 2021-01-01
UNIV OF SHANGHAI FOR SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] 1. For general detection components, such as microscopic objective lenses, the caliber of the mechanical measuring head will be greatly restricted in the detection of small distances, so the measurement range is small, and the type of workpiece to be measured is relatively simple;
[0004] 2. For the detection system with a short working distance, there are relatively large limitations when detecting components on different step surfaces, and it is necessary to change the position of the workpiece for multiple measurements to be able to accurately measure

Method used

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  • A Finite Conjugate Optical System with Equidistant Object and Image
  • A Finite Conjugate Optical System with Equidistant Object and Image
  • A Finite Conjugate Optical System with Equidistant Object and Image

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Embodiment

[0029] combine Figure 1 to Figure 9 As shown, a finite distance conjugate optical system with equidistant object and image provided in this embodiment includes a first lens 1, a second lens 2, a third lens 3 and a fourth lens 4 arranged in sequence along the optical axis direction, The first doublet lens composed of the first lens 1 and the second lens 2, the focal power of the first doublet lens is 0.0206, the third lens 3 and the fourth lens 4 are composed The second doublet lens, the optical power of the second doublet lens is 0.0115, the total optical power of the first doublet lens and the second doublet lens is 0.0278; the working distance is longer, with For measuring workpieces of different sizes.

[0030] In this embodiment, the first lens 1 and the third lens 3 are biconvex lenses, the second lens 2 and the fourth lens 4 are meniscus lenses that are concave to the object plane; the refractive power of the first lens 1 is 0.0194, the refractive power of the second ...

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Abstract

The invention discloses an object-image equidistant limited far conjugation optical system. The system comprises a first lens and a second lens which are sequentially arranged in the optical axial direction to formed a first doublet lens and a third lens and a fourth lens which form a second doublet lens, the optical power of the first doublet lens is 0.0206, the optical power of the second doublet lens is 0.0115, and the total optical power of the system is 0.0278. The system has the advantages that light emitted by a system object point passes through the first doublet lens group to generatea positive spherical aberration, the light reaches the second doublet lens group to achieve the purpose of correcting the spherical aberration, and finally high-quality imaging with completely corrected advanced aberration is obtained on an image plane. The system has the advantages that the working distance is long, the system can be used for measuring workpieces with different sizes and surfacetypes, a symmetric structure is adopted to eliminate comatic aberration, rayleigh criterion is met, measuring damage can be avoided by non-contact type measuring, the structure is simple, the cost islow, and the application is wide.

Description

technical field [0001] The invention relates to a conjugate optical system, in particular to a finite-distance conjugate optical system with equidistant objects and images, and belongs to the technical field of optical systems. Background technique [0002] In the current optical detection technology, non-contact detection has a great advantage, and can achieve high-precision measurement without damaging the surface of the object. However, for an optical system with a short working distance, there are the following problems when performing non-contact detection: [0003] 1. For general detection components, such as microscopic objective lenses, the caliber of the mechanical measuring head will be greatly restricted in the detection of small distances, so the measurement range is small, and the type of workpiece to be measured is relatively simple; [0004] 2. For the detection system with a short working distance, there are relatively large limitations when detecting compon...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B13/00
CPCG02B13/00
Inventor 韦晓孝吕元万新军李雪宸
Owner UNIV OF SHANGHAI FOR SCI & TECH
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