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Near 4 pai spatial angle femtosecond laser direct writing processing method with depth continuous adjustable function and application

A femtosecond laser, solid angle technology, used in laser welding equipment, metal processing equipment, manufacturing tools, etc., to reduce the effect of defocusing

Active Publication Date: 2019-05-03
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Two-photon excitation is used instead of traditional single-photon excitation to solve the defocus problem when using femtosecond laser to write waveguide directly. At the same time, a glass quadrangular prism is introduced to control the split laser beams to enter the glass quadrangular prism and then converge orthogonally to form a near-spherical shape. Focus spot for continuously adjustable processing depth inside the sample
In this way, the use of two-photon excitation and glass quadrangular prism simultaneously solves the problem of defocusing when the femtosecond laser is directly written at a large buried depth and the problem of continuous adjustment of the processing depth, and can prepare materials with different processing depths and uniform properties in the material to be processed. 3D Embedded Waveguide

Method used

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  • Near 4 pai spatial angle femtosecond laser direct writing processing method with depth continuous adjustable function and application
  • Near 4 pai spatial angle femtosecond laser direct writing processing method with depth continuous adjustable function and application
  • Near 4 pai spatial angle femtosecond laser direct writing processing method with depth continuous adjustable function and application

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Experimental program
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Effect test

Embodiment 1

[0033] Two-photon excitation is achieved by adjusting the time-domain synchronization of sub-beam femtosecond laser pulses.

[0034] The method of using two-photon excitation to "combine" energy can also provide the energy required for material modification. By adding a glass quadrangular mirror QL and a refractive index matching liquid on the surface of the sample, the two facets perpendicular to each other of the laser vertical incidence QL are adjusted, so that the two femtosecond laser beams do not refract when they enter the sample through the QL, thus effectively The defocusing is weakened and the near-spherical two-photon excitation focal spot with a solid angle of nearly 4π is obtained, which solves the serious defocusing of the single-beam femtosecond laser in direct writing processing with a large buried depth. In order to ensure that the energy of the two photons can be effectively superimposed, the femtosecond laser needs to be divided into beams and adjusted seque...

Embodiment 2

[0045] Fabrication of buried depth-varying glass waveguide devices using a two-photon excitation focal spot with nearly 4π solid angle.

[0046] By synchronously controlling the movement of the sample stage and the piezoelectric platform up and down, the continuous adjustment of the depth of the two-photon excitation focal spot inside the material to be processed can be realized, so that the direct writing processing of the three-dimensional waveguide structure with a large buried depth can be realized.

[0047] Three-dimensional embedded structure processing using two-photon excitation focal spot with nearly 4π solid angle:

[0048] (1), pulse time synchronous rough adjustment: with embodiment 1,

[0049] (2), pulse space synchronization adjustment: same as embodiment 1.

[0050] (3), synchronous fine-tuning of pulse time: same as embodiment 1.

[0051] (4) Direct writing of three-dimensional embedded structure: the material to be processed is glass, and the embedding depth...

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Abstract

The invention discloses a near 4 pai spatial angle femtosecond laser direct writing processing method with a depth continuous adjustable function and application, and belongs to the technical field oflaser processing. By the adoption of two-photon stimulation, the problem of defocusing caused during waveguide direct writing of femtosecond lasers is solved, meanwhile, a pyramid is adopted, and therefore it is achieved that the processing depth in a sample is continuously adjustable. The femtosecond lasers are focused and perpendicularly enter the corresponding rectangular surfaces in one pyramid, with the height change controlled by a piezoelectric platform, of the surface of the sample after being subjected to beam splitting to reach the interior of a to-be-processed material, energy of two photons makes up the energy threshold value corresponding to original single photon stimulation, the piezoelectric platform and a sample movement platform are controlled to enable the pyramid and the sample to synchronously move in the Z-axis direction, meanwhile, the problem of defocusing caused during femtosecond laser large-setting-depth direct writing is solved, the purpose of the continuous adjustable processing depth during femtosecond laser large-setting-depth direct writing is achieved, and three-directional embedded type waveguide with different processing depths and uniform properties can be prepared in the to-be-processed material.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and specifically relates to femtosecond laser direct writing processing of glass waveguides with continuously variable processing depth by using two-photon excitation. The beam-splitting laser is adjusted to be perpendicular to the two surfaces of the glass triangular prism, so as to realize the direct writing process of the glass waveguide with continuously variable buried depth based on multiphoton excitation. technical background [0002] Optical waveguides are the basis of integrated optics. Compared with methods such as ultraviolet exposure, ion diffusion, and ion / neutron implantation to make optical waveguides, femtosecond laser direct writing processing technology has the characteristics of high precision and three-dimensional processing, and can realize waveguide direct writing in almost any transparent medium. . Cross-sectional symmetry is one of the necessary conditions for t...

Claims

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Application Information

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IPC IPC(8): B23K26/06B23K26/064
Inventor 孙洪波田振男李泽政陈岐岱
Owner JILIN UNIV