High-sealability vacuum film plating machine and control method thereof

Abstract

The invention relates to a high-sealability vacuum film plating machine and a control method thereof. The film plating machine is provided with a frame, a film plating chamber and an equipment cabin;the frame comprises a film plating machine frame, and a film plating machine cabin door for closing the film plating chamber; the film plating machine frame is provided with a groove filled with sealing rubber strips; a bearing is arranged in the center of the film plating chamber; a heating resistor is arranged on the side wall; a tray is arranged in the vertical direction of the bearing; a spraying gun is arranged in the film plating chamber; the equipment cabin is provided with a vacuum system and a control cabinet; the vacuum system is connected with the film plating chamber through a pipe; the pipe is connected with a dispersion pump and a mechanical pump at the same time; a high-vacuum butterfly valve is arranged between the pipe and the dispersion pump; a low-vacuum butterfly valveis arranged between the pipe and the mechanical pump; and an air storage barrel is arranged between the dispersion pump and the low-vacuum butterfly valve. The control method comprises the steps of cabin door closing, low vacuum extraction, high vacuum extraction, film plating chamber heating, bearing rotation and taking-out of workpieces from the film plating machine. The film plating machine isexcellent in sealing effect and low in backflow rate, reduces the temperature needed by system film plating, and prolongs the service life.

Description

technical field [0001] The invention belongs to the field of vacuum coating machines, and in particular relates to a vacuum coating machine with high sealing performance and a control method thereof. Background technique [0002] Vacuum coating is a method of heating metal or metal materials in a high vacuum environment, and its oxides become gaseous atoms or molecules, which are deposited on the surface of metal or non-metal to form a thin film. It has low energy consumption, non-toxic, no waste liquid, Pollution is small and so on. The vacuum coating machine is mainly composed of a coating chamber, a vacuum system, an electrical control, and a frame. The vacuum system is an important part used for vacuuming to obtain a vacuum. However, the existing vacuum coating machines have poor sealing performance and vacuum The reflow rate of the system is high, the heat energy required for coating is high, the high temperature environment will seriously damage the parts of the coati...

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Problems solved by technology

The vacuum coating machine is mainly composed of a coating chamber, a vacuum system, an electrical control, and a frame, among which the vacuum system is an important part used for vacuuming to obtain a vacuum. However, the existing vacuum coating machines have poor sealing performance and vacuum The reflux rate of the system is high, the heat energy required for coating is high, the high temperature environment seriously damages the parts of the coating machine, the service life is short, and energy is wasted; in the prior art, multiple vacuum pumps are generally used for vacuuming operation, which is The coating machine is required to increase the accommodation area of ​​the equipment cabin and increase the economic cost

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