Sub-wavelength structure based terahertz radiation modulated photo-conductive antenna and preparation method thereof

A photoconductive antenna and terahertz radiation technology, which is applied in the field of terahertz electromagnetic wave radiation, can solve the problems of photoconductive antenna light-terahertz conversion efficiency reduction, etc., to achieve control of field distribution and frequency response, optimize signal-to-noise ratio, and improve The effect of transmit power

Inactive Publication Date: 2019-05-07
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

And because much of the incident light is reflected or passes through the photoelectric film before being absorbed, the light-to-THz conversion efficiency in photoconductive antennas decreases

Method used

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  • Sub-wavelength structure based terahertz radiation modulated photo-conductive antenna and preparation method thereof
  • Sub-wavelength structure based terahertz radiation modulated photo-conductive antenna and preparation method thereof
  • Sub-wavelength structure based terahertz radiation modulated photo-conductive antenna and preparation method thereof

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preparation example Construction

[0035] The preparation method of the photoconductive antenna includes:

[0036] Step 1. A GaAs thin film 2 is grown on the surface of the GaAs substrate 1.

[0037] In step 1, a non-stoichiometric GaAs film is grown on the surface of the GaAs substrate 1 at low temperature. Specifically, the growth temperature is controlled at 150-250°C in order to make the carrier lifetime of the semiconductor material GaAs shorter than the drift time of the carriers between the electrodes 4, which is beneficial to the radiation of the terahertz wave. The thickness of the grown GaAs film 2 is 100-300 nm.

[0038] Step 2: Growing a metal nano-array 3 on the surface of the GaAs film 2 according to the first preset pattern.

[0039] In step 2, design and determine the parameters of the first preset pattern according to the wavelength of the incident light, where the first preset pattern is the pattern of the metal nanoarray 3, mainly including the diameter of the gold pillars of the metal nanoarray 3 t...

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Abstract

The invention provides a sub-wavelength structure based terahertz radiation modulated photo-conductive antenna and a preparation method thereof. The method comprises the following steps that 1) a GaAsfilm (2) is grown on the surface of a GaAs substrate (1); 2) a metal nanometer array (3) is grown on the surface of the GaAs film (2) according to a first preset pattern; 3) the surface of the GaAs film (2) is etched according to a second preset pattern, and titanium and gold are deposited successively to form an electrode (4); and 4) the electrode (4) is led out and packaged.

Description

Technical field [0001] The present disclosure relates to the field of terahertz electromagnetic wave radiation, and in particular, to a photoconductive antenna based on sub-wavelength structure modulation terahertz radiation and a preparation method thereof. Background technique [0002] The development of terahertz technology has been widely used in biology, medicine, environmental monitoring, aerospace and military. Terahertz energy is very low, and it will not cause ionization damage and destruction to biological epidermis and protein tissues like high-energy X-rays. It is very suitable for biological research and medical diagnosis. The Hertz band has absorption spectra, which can be used for atmospheric monitoring and safety monitoring; the advantages of high terahertz frequency, short pulse, and high spatial and temporal resolution make it also have important applications in the aerospace and military fields. [0003] Based on the above potential applications, researchers hav...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01Q1/38H01Q1/22
Inventor 徐云张林奥宋国峰陈良惠
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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