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Concentration detection method and pressure type flow control device

A technology of flow control device and concentration detection, applied in the direction of flow control, measurement device, non-electric variable control, etc.

Active Publication Date: 2021-06-08
FUJIKIN INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0013] However, as described in Patent Document 2, when a concentration measuring device is installed in the mixed gas supply system, there is an unavoidable problem of increasing the size and cost of the device.

Method used

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  • Concentration detection method and pressure type flow control device
  • Concentration detection method and pressure type flow control device
  • Concentration detection method and pressure type flow control device

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Embodiment Construction

[0048] Below, while referring to the attached Figure 1 While the pressure type flow control device and the concentration detection method using the pressure type flow control device according to the embodiments of the present invention will be described, the present invention is not limited to the following embodiments.

[0049] figure 1An example of the mixed gas supply system 1 incorporating the pressure type flow control device 10 according to the present embodiment is shown. The mixed gas supply system 1 includes: a dilution gas supply source 2 and a flow control valve 3 interposed in a dilution gas supply line extending from the dilution gas supply source 2; a raw material gas supply source 4; The mixed gas introduction part 5 communicated with the supply source 4; the pressure type flow control device 10 arranged on the downstream side of the mixed gas introduction part 5; the on-off valve 6 arranged on the downstream side of the pressure type flow control device 10; a...

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Abstract

The present invention provides a concentration detection method, which is a method for detecting the concentration of a specified gas contained in a mixed gas, comprising: an upstream valve provided with a throttling portion, an upstream valve arranged on the upstream side of the throttling portion, and a measuring In the pressure type flow control device of the pressure sensor of the pressure between the valves, the process of flowing the mixed gas from the upstream side of the upstream valve in the state where the pressure on the downstream side of the throttle part is lower than the pressure on the upstream side of the throttle part ; a step of detecting a pressure drop characteristic after the upstream valve is changed from open to closed by a pressure sensor; and a step of detecting a concentration of a predetermined gas in the mixed gas based on the pressure drop characteristic.

Description

technical field [0001] The present invention relates to a method for detecting the concentration of a predetermined gas in a mixed gas using a pressure-type flow control device used in semiconductor manufacturing equipment, chemical plants, and the like. Background technique [0002] Conventionally, there is known a pressure-type flow control device, which includes: a flow path through which fluid passes; a throttling part such as an orifice plate (orifice plate) interposed in the flow path; and detecting the upstream pressure P of the throttling part. 1 The upstream pressure sensor; detects the downstream pressure P of the throttling part 2 a downstream pressure sensor; a temperature sensor that detects a temperature T upstream of the throttle; a control valve provided upstream of the upstream pressure sensor; and a controller that controls the control valve (Patent Document 1, etc.). Downstream of the pressure-type flow control device, a block valve, a process chamber of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N9/26
CPCG01N33/0027G01N9/26G01F1/36G05D7/0635
Inventor 永濑正明相川献治平田薰今井嵩浩成富哲央篠原努松田隆博西野功二
Owner FUJIKIN INC
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