Laser detection type four-probe atomic force microscope

Abstract

The invention relates to the technical field of atomic force microscopes, and discloses a laser detection type four-probe atomic force microscope which comprises two groups of first laser components,two groups of second laser components, two groups of first probe components, two groups of second probe components and optical components. The first laser components comprise first lasers for transmitting first laser light, the second laser components comprise second lasers for transmitting second laser light, and a direction of the first laser light is different from that of the second laser light. By the optical components, the first laser light can be focused on first probes, and the second laser light can be focused on second probes. By the aid of four groups of probe components, influenceof contact resistance on intrinsic resistivity of detected samples is removed, intrinsic electrical properties of the samples can be acquired by measuring once, and each group of probe components cancomprise probes with different functions, so that multi-physics field properties such as heat and electricity in the same area of the detected samples are synchronously represented.

Description

technical field [0001] The invention relates to the technical field of atomic force microscopes, in particular to a laser detection type four-probe atomic force microscope. Background technique [0002] Atomic Force Microscope (AFM) is an important tool for micro-nano scale morphology characterization, physical property measurement and micro-nano manipulation. The optical path structure of the atomic force microscope includes the probe tip and the micro-cantilever. The probe tip is fixed on the micro-cantilever. There is an interaction force between the atoms at the probe tip and the atoms on the surface of the sample to be measured. The interaction force varies with the distance between the two atoms. The interaction force will cause the deformation of the micro-cantilever. With the deformation as feedback, the distance between the atoms at the tip of the probe and the atoms on the surface of the sample to be measured is controlled by adjusting the up and down movement of t...

AI Technical Summary

Problems solved by technology

[0005] Based on the above, the object of the present invention is to provide a laser detection type four-probe atomic force microscope to solve the contact resistance between the needle tip and the measured sample when the existing laser detection type double-probe atomic force microscope measures electrical transport properties The problems of large size, cumbersome operation steps and low detection efficiency

Images