A Four-probe Atomic Force Microscope with Laser Detection

Abstract

The invention relates to the technical field of atomic force microscopes, and discloses a laser detection type four-probe atomic force microscope. The laser detection type four-probe atomic force microscope includes two sets of first laser assemblies, two sets of second laser assemblies, two sets of first probe assemblies, two sets of second probe assemblies and optical assemblies, and the first laser assemblies include emitting The first laser of the first laser, the second laser component includes a second laser emitting a second laser, the direction of the first laser is different from that of the second laser, the optical component can focus the first laser on the first probe, and can make the The second laser is focused on the second probe. The present invention adopts four sets of probe components, which eliminates the influence of contact resistance on the intrinsic resistivity of the tested sample, and can obtain the intrinsic electrical properties of the sample through one measurement; each set of probe components can use probes with different functions , to realize the simultaneous characterization of the thermal, electrical and other multi-physics properties of the same area of ​​the tested sample.

Description

technical field [0001] The invention relates to the technical field of atomic force microscopes, in particular to a laser detection type four-probe atomic force microscope. Background technique [0002] Atomic Force Microscope (AFM) is an important tool for micro-nano scale morphology characterization, physical property measurement and micro-nano manipulation. The optical path structure of the atomic force microscope includes the probe tip and the micro-cantilever. The probe tip is fixed on the micro-cantilever. There is an interaction force between the atoms at the probe tip and the atoms on the surface of the sample to be measured. The interaction force varies with the distance between the two atoms. The interaction force will cause the deformation of the micro-cantilever. With the deformation as feedback, the distance between the atoms at the tip of the probe and the atoms on the surface of the sample to be measured is controlled by adjusting the up and down movement of t...

AI Technical Summary

Problems solved by technology

[0005] Based on the above, the object of the present invention is to provide a laser detection type four-probe atomic force microscope to solve the contact resistance between the needle tip and the measured sample when the existing laser detection type double-probe atomic force microscope measures electrical transport properties The problems of large size, cumbersome operation steps and low detection efficiency

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