Triaxial angular speed measurement system for holosymmetric micro electro-mechanical system gyroscope
A microelectromechanical gyroscope and speed measurement technology, which is applied in the direction of speed/acceleration/shock measurement, test/calibration of speed/acceleration/shock measurement equipment, measurement device, etc. performance and other issues to reduce drift and improve performance
Active Publication Date: 2019-05-28
SOUTHEAST UNIV
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Problems solved by technology
[0003] The measurement of three-axis angular velocity faces the same zero offset drift problem as that of single-axis measurement
However, the disadvantage of this method is that it relies on the repeatability of the gyro bias drift
If the zero offset drift of the gyroscope after each power-on is not completely repeated, the calibration method cannot be used to fundamentally eliminate the drift
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[0021] The technical solution of the present invention will be further introduced below in combination with specific embodiments.
[0022] This specific embodiment discloses a three-axis angular velocity measurement system of a fully symmetrical micro-electromechanical gyroscope, such as figure 1 As shown, it includes a gyro module 1 , a gyro control system 2 and an assembly structure 3 . The gyroscope module 1 includes four gyroscopes, namely a first gyroscope, a second gyroscope, a third gyroscope and a fourth gyroscope. The internal structures of the four tops are the same, and the internal structure of the first top will be introduced below. like figure 2 As shown, the first gyroscope has an X-axis excitation mechanism, a Y-axis excitation mechanism, a fully symmetrical resonator, an X motion detection mechanism, and a Y motion detection mechanism; the X-axis excitation mechanism will apply a voltage V xa Converted to the electrostatic force f along the X axis xa , so...
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The invention discloses a triaxial angular speed measurement system for a holosymmetric micro electro-mechanical system gyroscope. The system comprises a gyroscope module and a gyroscope control system; the gyroscope module comprises a plurality of gyroscope bodies, the gyroscope control system controls alternate reverse work modes of all the gyroscope bodies according to a certain time sequence,and zero offset values of the gyroscope bodies are solved; output of all the gyroscope bodies is calibrated in real time by combining the time sequence and the zero offset values, and a triaxial angular speed measurement value of the system is provided. The system adopts an on-line real-time calibration zero-offset method, so that zero-offset shifting of the holosymmetric microelectromechanical gyroscope is reduced as far as possible, and the performance of the gyroscope system is improved. Compared with a traditional calibration compensation method, the on-line real-time calibration zero-offset method cannot be limited by zero-offset repeatability of all the gyroscope bodies. The system adopts the mode that alternate mode reverse is conducted on all the gyroscope bodies to measure the triaxial angular speed, and compared with a technology that double gyroscope bodies adopt mode reverse to measure the single-axis angular speed, the adopted technology is more efficient and more economical.
Description
technical field [0001] The invention relates to the field of microelectromechanical gyroscopes, in particular to a three-axis angular velocity measurement system for microelectromechanical gyroscopes. Background technique [0002] Micro-electro-mechanical gyroscope is an angular velocity transmission sensor processed by MEMS (Micro-Electro-Mechanical System, micro-electro-mechanical system), which has a series of advantages such as small size, low power consumption, light weight, and low cost. At present, it is widely used in many fields, such as automobile safety, industrial control, consumer electronics and so on. It was first born in the late 1980s. In recent years, with the development of manufacturing technology and the deepening of related control technology research, the accuracy of MEMS gyroscopes has been rapidly improved. The drift of the MEMS gyroscope's bias is one of the main limiting factors of its performance. [0003] The measurement of three-axis angular v...
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IPC IPC(8): G01P3/44G01P21/02
Inventor 丁徐锴李宏生黄丽斌吕正贾佳阮志虎
Owner SOUTHEAST UNIV