Low-voltage-driven normally-open terahertz super-surface modulator and preparing method
A metasurface, normally open technology, applied in the field of terahertz wave applications, can solve the problems of inability to integrate microelectronic systems, etc., and achieve the effects of reducing terahertz wave loss, low cost, and easy access
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[0042] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
[0043] A normally-on terahertz metasurface modulator driven by low voltage, including a high-resistance silicon substrate 1, a buried gate electrode 2, a vanadium dioxide film, and a supersurface layer microstructure 4. The buried gate electrode 2 is formed by a diffusion process. The high-resistance silicon substrate 1 is prepared by selective doping and formed inside the high-resistance silicon substrate 1. The upper surface of the h...
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