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Method for contactlessly levitating a masking device

A non-contact and magnetic levitation technology, which is applied in the field of masking devices for masking substrates and non-contact levitation of masking devices, which can solve problems such as quality degradation

Inactive Publication Date: 2019-06-04
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Precise alignment of the mask to the target location is beneficial, as a misaligned mask can lead to degradation of the quality of the layer deposited on the substrate

Method used

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  • Method for contactlessly levitating a masking device
  • Method for contactlessly levitating a masking device
  • Method for contactlessly levitating a masking device

Examples

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Embodiment Construction

[0020] Reference will now be made in detail to various embodiments, one or more examples of which are illustrated in the accompanying drawings. In the following description of the drawings, the same reference numerals denote the same components. Generally speaking, only the differences regarding the various embodiments are described. Each example is provided by way of explanation and is not meant to be limiting. In addition, features illustrated or described as part of one embodiment can be used on or in combination with other embodiments to produce yet another embodiment. This specification is intended to include such modifications and changes.

[0021] The embodiments described herein relate to non-contact suspension of mask assemblies. The term "non-contact" used throughout the present disclosure may be understood to mean that the weight of the mask assembly is not maintained by mechanical contact or mechanical force, but by magnetic force. Specifically, the mask assembly ...

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Abstract

A method includes contactlessly levitating a mask assembly (200). The mask assembly includes a carrier (210) and a masking device (20) supported by the carrier. The method includes controlling a shapeof the carrier while the mask assembly is contactlessly levitated.

Description

Technical field [0001] The embodiments described herein relate to a non-contact suspension of a masking device, and more specifically to a masking device for masking a substrate. More specifically, the embodiments described herein relate to non-contact suspension of a masking device configured to mask a large area substrate in a vertical direction. Background technique [0002] Several methods for depositing materials on substrates are known. For example, the substrate may be coated using an evaporation process, such as a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, a sputtering process, a spraying process, and the like. The process may be performed in a processing chamber of a deposition device, and the substrate to be coated is located in the processing chamber. The deposition material is provided in the processing chamber. A variety of materials, such as small molecules, metals, oxides, nitrides, and carbides, can be used to deposit on...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04H01L21/677C23C16/04C23C14/56C23C16/44H01L21/68B65G49/07
CPCC23C14/042C23C14/56C23C14/564C23C16/042C23C16/4401H01L21/67709H01L21/67712H01L21/682H01L21/02631H01L21/67751H10K71/233H10K71/00
Inventor 蒂莫·艾德勒
Owner APPLIED MATERIALS INC