A six-degree-of-freedom piezoelectric motion platform and its excitation method

Abstract

The invention discloses an ultra-precise six-degree-of-freedom piezoelectric motion platform and an excitation method thereof, and belongs to the technical field of piezoelectric driving. An upper side drive foot, an upper side bidirectional laminated bending type piezoelectric actuator, an insulating layer, a laminated torsional piezoelectric actuator, a guiding clamp plate, a laminated linear piezoelectric actuator and an intermediate drive foot are sequentially connected from top to bottom; the intermediate drive foot is supported by a top end of a vertical supporting column; the vertical support column, a supporting clamping plate, a lower side bidirectional laminated bending type piezoelectric actuator and a lower side drive foot are sequentially connected from top to bottom; a promoter is tightly pressed on a top surface of the upper side drive foot; a lower end of the lower side drive foot is tightly pressed on an upper surface of a base; the supporting clamp plate is slidably connected with a longitudinal guide rail; the longitudinal guide rail and a cross guide rail are slidably connected and are arranged crosswise; and the cross guide rail is connected with the base. According to the ultra-precise six-degree-of-freedom piezoelectric motion platform and the excitation method thereof disclosed by the invention, the structure is simple and the excitation method is reliable; the large-scale and high-precision multi-degree-of-freedom motion can be obtained, and the ultra-precise six-degree-of-freedom piezoelectric motion platform and the excitation method thereof havebroad application prospects in the fields of cell operation, microsurgery, optical adjustment and ultra-precision processing, and also have certain acceleration effects on development of the precise piezoelectric driving technology.

Description

technical field [0001] The invention belongs to the field of piezoelectric drive technology, in particular to an ultra-precision six-degree-of-freedom piezoelectric motion platform and an excitation method thereof. Background technique [0002] Stimulated by the rapid development and huge demand in the fields of micro-nano operation and detection, micro-life science, and ultra-precision machining, ultra-precision instruments and equipment have received increasing attention and research. As the core components of ultra-precision instruments and equipment, ultra-precision Precision drives are undoubtedly a top priority for research. In the field of ultra-precision instruments and equipment, the strict application requirements of ultra-high precision, large stroke, compact structure size and certain load capacity make the traditional electromagnetic drive principle no longer applicable. In contrast, the piezoelectric drive technology newly developed in recent years has shown o...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the technical problems of the current ultra-precision multi-degree-of-freedom piezoelectric motion platform with insufficient travel, complex structure, and large size, thereby proposing an ultra-precision six-degree-of-freedom piezoelectric motion platform and its excitation method

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