Diffusion furnace control system using programmable logic controller

Abstract

The invention discloses a diffusion furnace control system using a programmable logic controller, and belongs to the technical field of semiconductor manufacturing equipment. The programmable logic controller PLC is adopted as a main component of a diffusion furnace temperature control system, a gas flow control system and various interlocking control systems required by technological requirementsof core elements; a man-machine conversation interface controlled by the diffusion furnace is selected for input and display; the temperature control precision, the temperature stability and the control precision and the stability of various gas flow entering the furnace body are greatly improved compared with an original diffusion furnace control system; and control functions are diversified, operation is convenient, and the display of the temperature of the furnace body and the state of a gas circuit is clear. The system has the advantages that the working principle is clear, the control functions are diversified, operation is convenient, the display of the temperature of the furnace body and the state of the gas circuit are clear, so that the requirements of the diffusion technology inthe semiconductor manufacturing industry are further met.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and relates to a diffusion furnace control system, in particular to a diffusion furnace control system using a programmable controller. Background technique [0002] In recent years, the upgrading of diffusion equipment in my country has developed rapidly, and the speed of technological progress is unprecedented, but generally speaking, advanced and backward coexist, and there are still some gaps between the overall technical level and the international advanced level, especially in terms of equipment automation and local details. At present, there are more than 800 types of diffusion equipment in my country's photovoltaic cell equipment market, about 85% of which are mainly for processing 125mm×125mm cells and compatible with 156mm×156mm cells, and more than 90% of them are microcomputer automatic control equipment. Less than 10% are manual or PLC semi-automatic prod...

AI Technical Summary

Problems solved by technology

Domestically produced diffusion furnaces have many problems such as poor temperature control stability, inaccurate gas path quantitative control, and inability to store process programs during use, resulting in product parameters diverging to a certain extent and failing to meet production process requirements.

For this reason, the diffusion furnaces used in many enterprises are basically equipment imported from abroad, but these imported diffusion furnaces are expensive, which increases the production costs of enterprises