Ultra-precise three-axis rotary piezoelectric position regulation mechanism and excitation method thereof
A three-axis rotation, ultra-precision technology, applied in the direction of piezoelectric effect / electrostriction or magnetostriction motor, generator / motor, electrical components, etc., can solve the problem of difficult to achieve three-axis rotation output, single excitation method, Complicated structure and other issues, to achieve the effect of good scalability and technical value, simple and compact structure, high reliability
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Embodiment 1
[0057] The following is attached with the manual figure 1 , figure 2 , image 3 This embodiment will be further described in detail. This embodiment provides a figure 1 The shown ultra-precision three-axis rotating piezoelectric attitude adjustment mechanism uses a patch-type piezoelectric bicrystalline beam whose axis is parallel to the vertical direction as the drive unit 2 . The piezoelectric attitude adjustment mechanism includes a spherical mover 1, three piezoelectric bicrystalline beam drive units 2 and a base 3; the drive unit 2 includes an elastic matrix 2-1 and a piezoelectric ceramic 2-2, and The elastic base 2-1 is fixedly connected to the piezoelectric ceramic 2-2; the base 3 remains fixed, and the spherical mover 1 is connected to the end stage or the actuator, etc., and outputs around the X-axis, Y-axis, Rotational movement of the Z axis to achieve posture adjustment; the lower end surfaces of the three drive units 2 are fixed on the base 3, and the upper e...
Embodiment 2
[0063] The following is attached with the manual figure 2 , Figure 4 This embodiment will be further described in detail. This embodiment provides a Figure 4 The shown ultra-precision three-axis rotating piezoelectric attitude adjustment mechanism uses a patch-type piezoelectric bicrystalline beam whose axis is perpendicular to the vertical direction as the drive unit 2 . The piezoelectric attitude adjustment mechanism includes a spherical mover 1, three piezoelectric bicrystalline beam drive units 2 and a base 3; the drive unit 2 includes an elastic matrix 2-1 and a piezoelectric ceramic 2-2, and The elastic base 2-1 is fixedly connected to the piezoelectric ceramic 2-2; the base 3 remains fixed, and the spherical mover 1 is connected to the end stage or the actuator, etc., and outputs around the X-axis, Y-axis, Rotational movement of the Z axis to achieve posture adjustment; the lower end surfaces of the three drive units 2 are fixed on the base 3, and the upper end su...
Embodiment 3
[0069] The following is attached with the manual Figure 5 , Image 6 This embodiment will be further described in detail. This embodiment provides a Figure 5 The shown ultra-precision three-axis rotating piezoelectric attitude adjustment mechanism uses a sandwich piezoelectric vibrator whose axis is parallel to the vertical direction as the drive unit 2 . The piezoelectric attitude adjustment mechanism includes a spherical mover 1, three piezoelectric vibrator drive units 2 and a base 3; the drive unit 2 includes an elastic matrix 2-1 and a piezoelectric ceramic 2-2, and the elastic matrix 2-1 and the piezoelectric ceramic 2-2 are fixedly connected; the base 3 remains fixed, and the spherical mover 1 is connected to the end stage or the actuator, etc., and outputs around the X-axis, Y-axis, and Z-axis Rotational movement to achieve posture adjustment action; the lower end faces of the three drive units 2 are fixed on the base 3, and the upper end faces are pressed against...
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