Ultra-precise three-axis rotary piezoelectric position regulation mechanism and excitation method thereof

A three-axis rotation, ultra-precision technology, applied in the direction of piezoelectric effect / electrostriction or magnetostriction motor, generator / motor, electrical components, etc., can solve the problem of difficult to achieve three-axis rotation output, single excitation method, Complicated structure and other issues, to achieve the effect of good scalability and technical value, simple and compact structure, high reliability

Active Publication Date: 2019-06-14
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the technical problems of the existing piezoelectric attitude adjustment mechanism with complex structure, too small stroke, difficulty in realizing three-axis rotation output and single excitation method, thus proposing an ultra-precise three-axis rotation piezoelectric attitude adjustment mechanism and its incentives

Method used

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  • Ultra-precise three-axis rotary piezoelectric position regulation mechanism and excitation method thereof
  • Ultra-precise three-axis rotary piezoelectric position regulation mechanism and excitation method thereof
  • Ultra-precise three-axis rotary piezoelectric position regulation mechanism and excitation method thereof

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Embodiment 1

[0057] The following is attached with the manual figure 1 , figure 2 , image 3 This embodiment will be further described in detail. This embodiment provides a figure 1 The shown ultra-precision three-axis rotating piezoelectric attitude adjustment mechanism uses a patch-type piezoelectric bicrystalline beam whose axis is parallel to the vertical direction as the drive unit 2 . The piezoelectric attitude adjustment mechanism includes a spherical mover 1, three piezoelectric bicrystalline beam drive units 2 and a base 3; the drive unit 2 includes an elastic matrix 2-1 and a piezoelectric ceramic 2-2, and The elastic base 2-1 is fixedly connected to the piezoelectric ceramic 2-2; the base 3 remains fixed, and the spherical mover 1 is connected to the end stage or the actuator, etc., and outputs around the X-axis, Y-axis, Rotational movement of the Z axis to achieve posture adjustment; the lower end surfaces of the three drive units 2 are fixed on the base 3, and the upper e...

Embodiment 2

[0063] The following is attached with the manual figure 2 , Figure 4 This embodiment will be further described in detail. This embodiment provides a Figure 4 The shown ultra-precision three-axis rotating piezoelectric attitude adjustment mechanism uses a patch-type piezoelectric bicrystalline beam whose axis is perpendicular to the vertical direction as the drive unit 2 . The piezoelectric attitude adjustment mechanism includes a spherical mover 1, three piezoelectric bicrystalline beam drive units 2 and a base 3; the drive unit 2 includes an elastic matrix 2-1 and a piezoelectric ceramic 2-2, and The elastic base 2-1 is fixedly connected to the piezoelectric ceramic 2-2; the base 3 remains fixed, and the spherical mover 1 is connected to the end stage or the actuator, etc., and outputs around the X-axis, Y-axis, Rotational movement of the Z axis to achieve posture adjustment; the lower end surfaces of the three drive units 2 are fixed on the base 3, and the upper end su...

Embodiment 3

[0069] The following is attached with the manual Figure 5 , Image 6 This embodiment will be further described in detail. This embodiment provides a Figure 5 The shown ultra-precision three-axis rotating piezoelectric attitude adjustment mechanism uses a sandwich piezoelectric vibrator whose axis is parallel to the vertical direction as the drive unit 2 . The piezoelectric attitude adjustment mechanism includes a spherical mover 1, three piezoelectric vibrator drive units 2 and a base 3; the drive unit 2 includes an elastic matrix 2-1 and a piezoelectric ceramic 2-2, and the elastic matrix 2-1 and the piezoelectric ceramic 2-2 are fixedly connected; the base 3 remains fixed, and the spherical mover 1 is connected to the end stage or the actuator, etc., and outputs around the X-axis, Y-axis, and Z-axis Rotational movement to achieve posture adjustment action; the lower end faces of the three drive units 2 are fixed on the base 3, and the upper end faces are pressed against...

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Abstract

The invention discloses an ultra-precise three-axis rotary piezoelectric position regulation mechanism and an excitation method thereof, belonging to the technical field of piezoelectric driving. Theexisting piezoelectric position regulation mechanism has insufficient freedom degree, complex structure, and is high in cost and low in accuracy. The ultra-precise three-axis rotary piezoelectric position regulation mechanism solves the above technical problems. The piezoelectric position regulation mechanism comprises a rotor, a drive unit and a base, wherein the drive unit adopts an SMD piezoelectric double crystal beam structure or a sandwich type piezoelectric vibrator structure, and bends so as to drive the rotor to rotate around three axes. According to the excitation method, the rotor can realize large-scale ultra-precise three-axis rotation, and nano-level resolution is realized by regulating amplitude and time of the excitation signal. The piezoelectric position regulation mechanism has a compact structure and is flexible in arrangement. The excitation method is simple and reliable, and has good application prospect in fields like ultra-precise position regulation.

Description

technical field [0001] The invention belongs to the field of piezoelectric drive technology, and in particular relates to an ultra-precise three-axis rotary piezoelectric attitude adjustment mechanism and an excitation method thereof. Background technique [0002] Under the huge demand for observation and operation equipment in the fields of cell science, genetic engineering, surface physics and ultra-precision machining, ultra-precise positioning and attitude adjustment devices have received extensive attention and research. In view of the huge scientific value, economic value and social value in related fields, ultra-precise attitude adjustment devices based on many principles and structures have been proposed one after another. Among these research results, piezoelectric drive equipment occupies an important position. Generally speaking, piezoelectric driving equipment works by using the inverse piezoelectric effect of piezoelectric materials. Due to the particularity of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/10H02N2/14
Inventor 刘英想于洪鹏陈维山张仕静
Owner HARBIN INST OF TECH
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