Sensor array system and manufacturing method

A sensor array and sensor technology, applied in the field of sensors, can solve problems such as mutual interference, long manufacturing time, and affecting the performance of the sensor array system, and achieve the effects of reducing wiring, increasing signal transmission speed, and reducing wiring difficulty

Inactive Publication Date: 2019-07-09
NINGBO GRAPHENE INNOVATION CENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the prior art, when manufacturing sensor arrays and integrated circuits, they need to be manufactured successively on the same plane substrate, the manufacturing time is too long, and mutual interference will inevitably occur during the manufacturing process, which will affect the performance of the sensor array system

Method used

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  • Sensor array system and manufacturing method
  • Sensor array system and manufacturing method

Examples

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Embodiment

[0037] See figure 1 , figure 1 It is a partial cross-sectional view of the sensor array system provided by the embodiment of the present application, which shows a sensor array system 100 provided by the embodiment of the present application, and the sensor array system 100 includes a sensor 110 , an integrated circuit 120 and a substrate 130 . The substrate 130 is disposed between the sensor 110 and the integrated circuit 120 to separate the sensor 110 and the integrated circuit 120 . The power supply terminal 111 of the sensor 110 is electrically connected to the integrated circuit 120 through the connection part 140 .

[0038] image 3 is a top view of the sensor array system provided by the embodiment of the present application, Figure 4 is a schematic diagram of the three-dimensional structure of the sensor array system provided by the embodiment of the present application; please refer to image 3 and Figure 4 , in a specific implementation manner, the sensor 110 ...

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PUM

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Abstract

The embodiment of the invention provides a sensor array system and a manufacturing method. The sensor array system comprises a sensor, an integrated circuit and a substrate, wherein the substrate is arranged between the sensor and the integrated circuit and used for separating the sensor from the integrated circuit, and the electrifying end of the sensor is electrically connected with the integrated circuit through a connecting part. The sensor and the integrated circuit are arranged on the two sides of the substrate respectively, so that the sensor and the integrated circuit are not located on the same plane, the sensor and the integrated circuit which are not located on the same plane can be electrically connected through the connecting part, and the function realization of the sensor isnot affected. The sensor and the integrated circuit can be independently manufactured without mutual interference through detachable manufacturing and packaging, so that the manufacturing time efficiency and performance of the sensor array system can be improved.

Description

technical field [0001] The present application relates to the field of sensors, in particular, to a sensor array system and a manufacturing method. Background technique [0002] A sensor array is a group of sensors that can be deployed in some geometric pattern for the collection and processing of electromagnetic or acoustic signals. The advantage of a sensor array over a single sensor is that the array adds a new dimension to observations, helping to capture more parameters and improve performance. In view of the different surface shapes and positions of the detection objects, in order to improve the accuracy of the dynamic distribution detection of the contact surface interaction, the importance of sensor array research is increasing day by day. Sensor arrays are widely used in advanced fields such as biomechanics, electronic skin, and ergonomics. [0003] In the prior art, when manufacturing the sensor array and the integrated circuit, they need to be manufactured succes...

Claims

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Application Information

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IPC IPC(8): B81B3/00B81C1/00
CPCB81B3/0027B81C1/00349B81C1/00015
Inventor 周书瑶吴丽琼刘湘祁张楠刘兆平
Owner NINGBO GRAPHENE INNOVATION CENT CO LTD
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