Transverse subtraction differential confocal ultra-long focal length measurement method

Abstract

The invention discloses a transverse subtraction differential confocal ultra-long focal length measurement method and belongs to the technical field of optical precision measurement. In a confocal measurement system, the method comprises the following steps: firstly, in an airy disk image detected by a CCD, a large virtual pinhole detection area and a small virtual pinhole detection area are set through software, and two detected confocal characteristic curves are subjected to subtraction processing so as to sharpen the confocal characteristic curves, secondly, the sharpened confocal characteristic curves are subjected to differential motion subtraction processing so as to obtain an axial high-sensitivity differential confocal characteristic curve, then, when the differential confocal characteristic curve zero point and the focal point of the differential confocal measurement system are used to accurately correspond to the characteristics to measure the measured ultra-long focal length, high-precision fixed-focus addressing is carried out on the position of each vertex, and finally, the ultra-long focal length is accurately obtained through ray tracing compensation calculation, andhigh-precision measurement of the ultra-long focal length is achieved. The method has the advantages of being high in measurement precision, high in capability of environmental disturbance resistance, simple in structure and the like, and a wide application prospect is achieved in the technical field of optical precision measurement.

Description

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AI Technical Summary

Benefits of technology

This patented technology describes an improved technique for measuring long distance (LF), particularly by utilizing two different techniques: one involves capturing images from both sides of the object being measured while maintaining their original shape or size; another involves creating specific patterns on top of these captured image data to enhance its resolution capabilities during measurements. By combining these technologies together, this new approach allows for precise determination of LF values over longer distances than previously possible due to increased sensitiveness against distortion factors such as temperature fluctuation.

Problems solved by technology

This patented describes various techniques that aim towards improving precision measurements over longer distances called superfocal or short distance telescopics (STM). One solution involves utilizing these techniques together to increase the resolution and accuracy required for accurate long range measurement of microscope images.

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