Transverse subtraction differential confocal ultra-long focal length measurement method

A technology of differential confocal and measurement methods, which is applied in geometrical characteristics/aberration measurement, optical performance testing, optical axis determination, etc. It can solve the problems of insufficient anti-environmental interference ability, low sensitivity of fixed focus, complex fixed focus system, etc. problems, to achieve the effect of improving anti-environmental interference ability, improving fixed-focus accuracy, and high-precision measurement
CN109990984AActive Publication Date: 2019-07-09BEIJING INSTITUTE OF TECHNOLOGYGY
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
BEIJING INSTITUTE OF TECHNOLOGYGY
Publication Date
2019-07-09

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Abstract

The invention discloses a transverse subtraction differential confocal ultra-long focal length measurement method and belongs to the technical field of optical precision measurement. In a confocal measurement system, the method comprises the following steps: firstly, in an airy disk image detected by a CCD, a large virtual pinhole detection area and a small virtual pinhole detection area are set through software, and two detected confocal characteristic curves are subjected to subtraction processing so as to sharpen the confocal characteristic curves, secondly, the sharpened confocal characteristic curves are subjected to differential motion subtraction processing so as to obtain an axial high-sensitivity differential confocal characteristic curve, then, when the differential confocal characteristic curve zero point and the focal point of the differential confocal measurement system are used to accurately correspond to the characteristics to measure the measured ultra-long focal length, high-precision fixed-focus addressing is carried out on the position of each vertex, and finally, the ultra-long focal length is accurately obtained through ray tracing compensation calculation, andhigh-precision measurement of the ultra-long focal length is achieved. The method has the advantages of being high in measurement precision, high in capability of environmental disturbance resistance, simple in structure and the like, and a wide application prospect is achieved in the technical field of optical precision measurement.
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