Vacuum pump, stator column therefor and manufacturing method thereof
A manufacturing method and a technology of a vacuum pump, which are applied to parts, pumps, and pump elements of a pumping device for elastic fluids, can solve the problems of reduced exhaust performance, reduced opening area, and increased number of parts of the vacuum pump, and achieve reduction cost effect
Active Publication Date: 2022-01-14
EDWARDS JAPAN
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Problems solved by technology
[0005] However, in the configuration in which the scattering preventing member 50 is provided at the suction port (14a) like the conventional vacuum pump (turbomolecular pump) described above, there is a possibility that the number of parts of the vacuum pump increases according to the amount of the scattering preventing member 50. Problems, Problems in which the exhaust performance of the vacuum pump (turbomolecular pump) itself decreases due to the decrease in the opening area of the suction port (14a) due to the scattering prevention member 50
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[0052] Below, while referring to the attached Figure 1 The best mode for carrying out the present invention will be described in detail.
[0053] figure 1 It is a cross-sectional view of a vacuum pump to which the present invention is applied.
[0054] figure 1 The vacuum pump P is a composite pump having a turbomolecular mechanism part Pt and a screw groove pump mechanism part Ps as a gas exhaust mechanism, and is used, for example, as a processing chamber in a semiconductor manufacturing device, a flat panel display manufacturing device, a solar panel manufacturing device, etc. The gas exhaust mechanism of the sealed cavity, etc.
[0055] exist figure 1 In the vacuum pump P, the exterior body 1 has a substantially cylindrical shape with a bottom by integrally connecting a cylindrical pump casing C and a pump base B along the cylindrical axial direction with fastening members.
[0056] The upper end side of the pump housing C ( figure 1 The upper side of the paper surf...
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Abstract
It is suitable for preventing the cracking of the stator post caused by the destruction energy of the rotating body and the flying of fragments due to the damage of the stator post from the suction port without deteriorating the exhaust performance and increasing the number of parts and cost. Defective, high-reliability vacuum pumps and stator columns therefor and methods of manufacture thereof. In the exterior body (1) having the air intake port (1A), the stator column (3) erected inside the exterior body, and the rotating body (4) in the shape surrounding the outer periphery of the stator column, the rotating body is supported so as to be able to In a vacuum pump that sucks gas from the suction port through the rotation of the support mechanism and the drive mechanism that drives the rotary body in rotation, the stator column (3) is made of an aluminum alloy with an elongation of 5% or more as a mechanical material characteristic Composition of casting materials.
Description
technical field [0001] The present invention relates to a vacuum pump used as a gas exhaust mechanism for a processing cavity in a semiconductor manufacturing device, a flat panel display manufacturing device, a solar panel manufacturing device and other closed cavities, a stator column for the vacuum pump and a manufacturing method thereof. Background technique [0002] Conventionally, as such a vacuum pump, for example, a turbomolecular pump described in Patent Document 1 is known. Referring to the document 1 figure 1 , the existing vacuum pump (turbomolecular pump) described in this document 1 has, as its specific pump components: an exterior body (14) provided with a suction port (14a), and a vacuum pump vertically installed inside the exterior body (14). The stator column (16), the rotating body (R) in the shape surrounding the outer periphery of the stator column (16), the support mechanism (20, 22) that supports the rotating body (R) in a rotatable manner, and the ro...
Claims
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IPC IPC(8): F04D19/04
CPCF04D19/042F04D29/522F04D29/023F05D2230/40F05D2300/173F04D29/321B22D21/04B22D25/02C22F1/04F05D2210/12F04D19/04F05D2260/60
Inventor 三桥启太三轮田透
Owner EDWARDS JAPAN