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Three-dimensional constant force parallel flexible micro-positioning platform

A micro-positioning platform, parallel technology, applied in the direction of instruments, instrument parts, etc., can solve the problems of increasing the physical size of the platform and hardware costs, and achieve high-precision positioning, reduce manufacturing costs, and reduce the demand for motor driving force. Effect

Active Publication Date: 2021-11-16
珠海澳大科技研究院 +1
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Problems solved by technology

[0007] Therefore, the existing three-dimensional large-stroke micro-positioning platform needs to use a larger driver to achieve large-stroke output, which increases the physical size and hardware cost of the platform.
In addition, the existing constant-force micro-positioning platform can only realize constant-force micro-positioning movement in a two-dimensional plane

Method used

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Embodiment Construction

[0028] In order to make the object, technical solution and advantages of the invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, and are not limited to the present invention.

[0029] see Figure 1 to Figure 5 , a three-dimensional constant force parallel flexible micro-positioning platform of the present invention includes a constant force output for providing a specified direction in a three-dimensional space, including a main frame and a force input mechanism located in the main frame, a force output mechanism 2, for connecting The force input mechanism and the force output mechanism 2 are a constant force mechanism that transmits the acting force. The constant force mechanism includes a parallel leaf spring mechanism 3 and an X-direction constant force mechanism, a ...

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Abstract

The invention discloses a three-dimensional constant force parallel flexible micro-positioning platform, which includes a main frame and a force input mechanism, a force output mechanism, and a constant force mechanism located in the main frame. The constant force mechanism includes a parallel leaf spring mechanism and a parallel leaf spring mechanism. The X-direction constant force mechanism, Y-direction constant force structure, and Z-direction constant force mechanism are connected separately. The X-direction constant force mechanism, Y-direction constant force mechanism, and Z-direction constant force mechanism are orthogonal to each other. The X-direction constant force mechanism includes The first negative stiffness mechanism and the first leaf spring flexible structure are connected in series, the Y-direction constant force mechanism includes the second negative stiffness mechanism and the second leaf spring flexible structure connected in series, and the Z-direction constant force mechanism includes the third negative stiffness mechanism connected in series. Stiffness mechanism and third leaf spring flexible structure. The invention adopts a parallel structure to realize motion decoupling, so that the positioning platform has three independent degrees of freedom in three-dimensional XYZ directions, and at the same time uses flexible hinge connections to avoid the shortcomings of traditional connections to achieve high-precision positioning.

Description

【Technical field】 [0001] The invention relates to the field of micro-nano precision drive and positioning technology, in particular to a three-dimensional constant force parallel flexible micro-positioning platform based on a flexible mechanism. 【Background technique】 [0002] Micro-positioning platform technology is a research and application hotspot in modern precision engineering. At present, the micro-positioning platform has been widely used in the fields of rapid pick-and-place operation of micro-nanoscale objects, high-precision manufacturing and assembly, and microinjection of biological cells. Due to the limitations of one-dimensional and two-dimensional micro-positioning platforms with less degrees of freedom, multi-dimensional micro-positioning platforms have received widespread attention. [0003] The Chinese invention patent application with the application number 201810029943.5 discloses a serial piezoelectric-driven micro-nano platform. Its three-dimensional ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 徐青松张小智
Owner 珠海澳大科技研究院
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