A closed-loop control piezoelectric drive online monitoring device
A piezoelectric drive and closed-loop control technology, which is applied in the direction of measuring devices, program control, computer control, etc., can solve problems that affect product integration and cannot realize long-distance online uploading
Active Publication Date: 2020-10-27
UNIV OF SCI & TECH OF CHINA
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Problems solved by technology
The data obtained by the traditional piezoelectric drive device is stored locally, and long-distance online uploading cannot be realized, which will greatly affect the integration of the product, and it is difficult to cooperate with other precision machinery
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[0041] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0042] Such as figure 1 As shown, it is a closed-loop control piezoelectric drive online monitoring device disclosed in the present invention. The device may include: a voltage source, a piezoelectric drive device, a sample stage, a displacement measurement device, a force and displacement control device, a force measurement device, Single-chip microcomputer and online monitoring system; among them:
[0043] The piezoelectric driving device is connected to th...
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The invention discloses a closed-loop control piezoelectric drive on-line monitoring device. A piezoelectric drive device generates displacement through periodic voltage signals provided by a voltagesource to drive a sample on a sample table; a displacement measuring device is used for measuring the displacement of the sample on the sample table; a force and displacement control device is used for controlling the displacement of the piezoelectric drive device; a force measuring device is used for measuring the mechanical force of the sample on the sample table; a singlechip is used for carrying out analog-to-digital conversion on the displacement quantity collected by the displacement measuring device and the mechanical force collected by the force measuring device; and an online monitoring system is used for storing monitoring data sent by the singlechip. The closed-loop control piezoelectric drive on-line monitoring device can solve the problem of position control precision of the piezoelectric drive device, closed-loop control of position movement is realized, on-line monitoring of displacement of the piezoelectric drive device is realized, on-line monitoring of the mechanicalforce of the sample is realized, and real-time monitoring of data by a remote client is realized so as to cooperate with other precision machines.
Description
technical field [0001] The invention relates to the field of piezoelectric drive technology, in particular to a closed-loop control piezoelectric drive online monitoring device. Background technique [0002] With the rapid development of the field of precision instruments, higher requirements are put forward for precision displacement drives. Frontier fields such as nano-robots, mechanical behavior characterization of new nano-materials, and precision positioning devices require extensive use of piezoelectric actuators. [0003] At present, piezoelectric actuators can be divided into resonant and non-resonant. Among them, the resonant piezoelectric drive device has a large driving force, but the displacement resolution is low, and precise positioning cannot be achieved. Non-resonant piezo actuators can achieve high displacement resolution, but with lower actuation forces. Both of the above are open-loop controls. When the displacement is fed multiple times, errors will ac...
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IPC IPC(8): G05B19/042G01D21/02
CPCG01D21/02G05B19/0423G05B2219/25257
Inventor 赵旸杨晓晨王涛
Owner UNIV OF SCI & TECH OF CHINA