All-ceramic ultra-high temperature pressure sensor and packaging method thereof

Abstract

The invention discloses an all-ceramic ultra-high-temperature pressure sensor, which comprises a high-temperature-resistant ceramic pressure-sensitive element, a high-temperature-resistant ceramic prototype packaging tube shell, and a high-temperature-resistant ceramic reading antenna. The high-temperature-resistant ceramic pressure-sensitive element is composed of a high-temperature-resistant pressure-sensitive capacitor and a rectangular Composed of spiral inductance coils, the high temperature resistant ceramic pressure sensitive element is installed on one side of the high temperature resistant ceramic prototype packaging shell, and the high temperature resistant heat resistant and shockproof cotton is installed between the high temperature resistant ceramic pressure sensitive element and the high temperature resistant ceramic prototype packaging shell, The high-temperature-resistant ceramic reading antenna is installed on the other side of the high-temperature-resistant ceramic prototype package; the sensitive end of the high-temperature-resistant ceramic prototype package is provided with an airflow hole perpendicular to the high-temperature-resistant ceramic pressure-sensitive element; the high-temperature-resistant ceramic reading antenna The transmission of pressure parameters is realized by inductive coupling with the pressure-sensitive LC circuit. The invention solves the problems of low working temperature and poor airtightness of the sensor prototype in the pressure parameter testing process, and realizes the in-situ measurement of the pressure parameter in the ultra-high temperature environment above 1000°C.

Description

technical field [0001] The invention relates to the field of high-temperature-resistant ceramic pressure sensors, in particular to an all-ceramic ultra-high-temperature pressure sensor and a packaging method thereof. Background technique [0002] With the continuous development of large-scale equipment such as advanced aviation engines and thermal power generation gas turbines, the demand for in-situ dynamic testing of pressure parameters in harsh environments such as ultra-high temperature and strong impact is increasing, which has become a key technology "bottleneck" restricting the performance improvement of engines and gas turbines. ". Traditional high-temperature pressure sensors are mainly based on materials such as silicon and silicon carbide, and adopt an active signal transmission method connected by wires. The material performance and signal transmission method limit the working temperature range of the sensor, and it is impossible to realize the pressure parameter...

AI Technical Summary

Problems solved by technology

[0003] The invention provides an all-ceramic ultra-high temperature pressure sensor and its packaging method, which solves the problems existing in traditional pressure sensors and realizes stable measurement of pressure parameters in ultra-high temperature environments

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