A broadband passive high temperature resistant flexible vibration sensor and its preparation process

Abstract

The invention discloses a wide-band passive high-temperature-resistant flexible vibration sensor. The sensor is divided into five layers from top to bottom, which are high-temperature-resistant aluminum oxide film packaging layer, capacitor upper plate and rectangular inductance coil layer, oxidation The aluminum film dielectric layer, the lower plate layer of the capacitor and the polyimide layer as the base. A capacitor lower plate is deposited on the polyimide substrate, an aluminum oxide film dielectric layer is deposited on the capacitor lower plate, a capacitor upper plate and an inductance coil are deposited on the aluminum oxide film dielectric layer, and the capacitor upper plate The pole plate is located at the center of the inductance coil, and a high-temperature-resistant aluminum oxide film encapsulation layer is deposited on the upper plate of the capacitor and the inductance coil. hole. The invention uses polyimide flexible material as the base, which can be completely attached to the surface of special-shaped components, and is not easy to be shaken off during large-scale equipment work, and can realize dynamic and accurate measurement of vibration parameters of the surface of special-shaped components.

Description

technical field [0001] The invention relates to the field of vibration sensors, in particular to a broadband passive high temperature resistant flexible vibration sensor and a preparation process thereof. Background technique [0002] With the continuous development of science and technology in our country, in the process of large-scale equipment manufacturing and operation, the requirements for the ability to dynamically monitor the complex surface vibration parameters of special heterogeneous components in extreme environments (-50 ° C ~ 300 ° C) are increasingly demanding, and it has become one of the The key technical "bottleneck" of performance improvement. Because the traditional vibration sensor is based on a non-flexible substrate, it cannot be closely attached to the surface of different components, and it is easy to fall off under working conditions, and the wired test method has problems such as poor contact of contacts and distortion of test results in extreme en...

AI Technical Summary

Problems solved by technology

Because the traditional vibration sensor is based on a non-flexible substrate, it cannot be closely attached to the surface of different components, and it is easy to fall off under working conditions, and the wired test method has problems such as poor contact contact and distortion of test results in extreme environments.

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