The invention discloses a
metal aluminum base aluminum
nitride package substrate and a preparation method thereof, and belongs to the field of microelectronic materials. The
package substrate comprises a
metal aluminum base, a porous anodic
alumina film formed on the surface of the
metal aluminum base, and an aluminum
nitride film formed on the surface of the anodic
alumina film, wherein the
porosity of the anodic
alumina film is reduced gradually along the direction from the metal aluminum base to the aluminum
nitride film. According to the preparation method of the
package substrate, metal aluminum is used as the base,
anodic oxidation is carried out on one surface of aluminum to generate a layer of the porous anodic alumina film, and then the aluminum nitride film is deposited on the anodic alumina film in a vacuum mode. According to the metal aluminum base aluminum nitride package substrate, the
anodic oxidation is carried out on the metal aluminum base, an anodic alumina thermal stress buffer layer with a coefficient of
thermal expansion gradually varied is formed between the aluminum base and the aluminum nitride film,
thermal shock resistance is improved obviously,
cracking does not occur under 300 DEG C
thermal shock, and therefore the metal aluminum base aluminum nitride package substrate can be applied in a subsequent process of
semiconductor chip package well.