Triangular beam flexible constraint variable stiffness micro-nano measuring head

Abstract

The invention discloses a triangular beam flexible constraint variable stiffness micro-nano measuring head, which comprises a moving platform, wherein the moving platform is in the shape of a truncated cone, one side of the moving platform is provided with a measuring component, the measuring component is connected with the moving platform by means of a measuring and supporting structure, the center of the measuring and supporting structure is coaxial with a circle center of the measuring component, a plurality of reflecting sheets are fixedly mounted on the measuring and supporting structure,the other side of the moving platform is provided with a plurality of interferometers corresponding to the reflecting sheets, and penetrating holes are formed in the moving platform at positions corresponding to the reflecting sheets; one end of the measuring and supporting structure is connected with the measuring component, the other end is connected with a piezoelectric stacker by means of flexible adjusting members, and the flexible adjusting members are distributed in a triangle under the moving platform; and a gap is formed between the top part of the measuring component and the bottomsurface of the moving platform. The triangular beam flexible constraint variable stiffness micro-nano measuring head can change the stiffness of the measuring component by adjusting different operating states of the piezoelectric stacker, and can satisfy requirements for different stiffness of the measuring component due to different measuring processes and measuring objects.

Description

technical field [0001] The invention relates to a precision measuring instrument, in particular to a triangular beam flexible constraint variable stiffness micro-nano measuring head. Background technique [0002] With the rapid development of microsystem technology, the demand for various micro precision components is increasing day by day. The measuring head is an important part of the three-coordinate measuring machine, and the overall measurement accuracy of the three-coordinate measuring machine depends on the measuring performance of the measuring head to a large extent. [0003] When the probe touches the surface of the fragile workpiece, in order to avoid the probe from scratching the surface of the workpiece during the measurement process, the support mechanism of the probe must have a low rigidity, and during the movement of the probe spindle, in order to ensure the stability of the probe system In order to avoid false triggering, it is necessary to increase the re...

AI Technical Summary

Problems solved by technology

[0005] 1. The fixed stiffness measuring head cannot adjust the stiffness, and it is difficult to achieve isotropy of stiffness;

[0006] 2. The inertial force generated by the low-rigidity probe when approaching and moving away from the workpiece is likely to cause false triggering;

[0007] 3. The low-stiffness measuring head has poor manufacturability, difficult processing and low precision;

[0008] 4. Potential damage to the sensitive elastic beam during the adsorption and attraction process of the low-stiffness probe;

[0009] 5. The high-rigidity probe is easy to cause damage to the surface of the workpiece to be measured during measurement

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